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Bibliographic details for 17544337. Etch Back and Film Profile Shaping of Selective Dielectric Deposition simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)
- Page name: 17544337. Etch Back and Film Profile Shaping of Selective Dielectric Deposition simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 January 2024 06:53 UTC
- Date retrieved: 8 June 2024 10:49 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17544337._Etch_Back_and_Film_Profile_Shaping_of_Selective_Dielectric_Deposition_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25788
- Page Version ID: 25788
Citation styles for 17544337. Etch Back and Film Profile Shaping of Selective Dielectric Deposition simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)
APA style
17544337. Etch Back and Film Profile Shaping of Selective Dielectric Deposition simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION). (2024, January 4). WikiPatents, . Retrieved 10:49, June 8, 2024 from http://wikipatents.org/index.php?title=17544337._Etch_Back_and_Film_Profile_Shaping_of_Selective_Dielectric_Deposition_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25788.
MLA style
"17544337. Etch Back and Film Profile Shaping of Selective Dielectric Deposition simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)." WikiPatents, . 4 Jan 2024, 06:53 UTC. 8 Jun 2024, 10:49 <http://wikipatents.org/index.php?title=17544337._Etch_Back_and_Film_Profile_Shaping_of_Selective_Dielectric_Deposition_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25788>.
MHRA style
WikiPatents contributors, '17544337. Etch Back and Film Profile Shaping of Selective Dielectric Deposition simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)', WikiPatents, , 4 January 2024, 06:53 UTC, <http://wikipatents.org/index.php?title=17544337._Etch_Back_and_Film_Profile_Shaping_of_Selective_Dielectric_Deposition_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25788> [accessed 8 June 2024]
Chicago style
WikiPatents contributors, "17544337. Etch Back and Film Profile Shaping of Selective Dielectric Deposition simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION)," WikiPatents, , http://wikipatents.org/index.php?title=17544337._Etch_Back_and_Film_Profile_Shaping_of_Selective_Dielectric_Deposition_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25788 (accessed June 8, 2024).
CBE/CSE style
WikiPatents contributors. 17544337. Etch Back and Film Profile Shaping of Selective Dielectric Deposition simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION) [Internet]. WikiPatents, ; 2024 Jan 4, 06:53 UTC [cited 2024 Jun 8]. Available from: http://wikipatents.org/index.php?title=17544337._Etch_Back_and_Film_Profile_Shaping_of_Selective_Dielectric_Deposition_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25788.
Bluebook style
17544337. Etch Back and Film Profile Shaping of Selective Dielectric Deposition simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION), http://wikipatents.org/index.php?title=17544337._Etch_Back_and_Film_Profile_Shaping_of_Selective_Dielectric_Deposition_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25788 (last visited June 8, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17544337. Etch Back and Film Profile Shaping of Selective Dielectric Deposition simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17544337._Etch_Back_and_Film_Profile_Shaping_of_Selective_Dielectric_Deposition_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25788",
note = "[Online; accessed 8-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17544337. Etch Back and Film Profile Shaping of Selective Dielectric Deposition simplified abstract (INTERNATIONAL BUSINESS MACHINES CORPORATION) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17544337._Etch_Back_and_Film_Profile_Shaping_of_Selective_Dielectric_Deposition_simplified_abstract_(INTERNATIONAL_BUSINESS_MACHINES_CORPORATION)&oldid=25788}",
note = "[Online; accessed 8-June-2024]"
}
