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Bibliographic details for 18062502. METHOD OF FORMING LOW-RESISTIVITY RU ALD THROUGH A BI-LAYER PROCESS AND RELATED STRUCTURES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 18062502. METHOD OF FORMING LOW-RESISTIVITY RU ALD THROUGH A BI-LAYER PROCESS AND RELATED STRUCTURES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

18062502. METHOD OF FORMING LOW-RESISTIVITY RU ALD THROUGH A BI-LAYER PROCESS AND RELATED STRUCTURES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 4). WikiPatents, . Retrieved 23:29, June 9, 2024 from http://wikipatents.org/index.php?title=18062502._METHOD_OF_FORMING_LOW-RESISTIVITY_RU_ALD_THROUGH_A_BI-LAYER_PROCESS_AND_RELATED_STRUCTURES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25464.

MLA style

"18062502. METHOD OF FORMING LOW-RESISTIVITY RU ALD THROUGH A BI-LAYER PROCESS AND RELATED STRUCTURES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 4 Jan 2024, 06:07 UTC. 9 Jun 2024, 23:29 <http://wikipatents.org/index.php?title=18062502._METHOD_OF_FORMING_LOW-RESISTIVITY_RU_ALD_THROUGH_A_BI-LAYER_PROCESS_AND_RELATED_STRUCTURES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25464>.

MHRA style

WikiPatents contributors, '18062502. METHOD OF FORMING LOW-RESISTIVITY RU ALD THROUGH A BI-LAYER PROCESS AND RELATED STRUCTURES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 4 January 2024, 06:07 UTC, <http://wikipatents.org/index.php?title=18062502._METHOD_OF_FORMING_LOW-RESISTIVITY_RU_ALD_THROUGH_A_BI-LAYER_PROCESS_AND_RELATED_STRUCTURES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25464> [accessed 9 June 2024]

Chicago style

WikiPatents contributors, "18062502. METHOD OF FORMING LOW-RESISTIVITY RU ALD THROUGH A BI-LAYER PROCESS AND RELATED STRUCTURES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18062502._METHOD_OF_FORMING_LOW-RESISTIVITY_RU_ALD_THROUGH_A_BI-LAYER_PROCESS_AND_RELATED_STRUCTURES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25464 (accessed June 9, 2024).

CBE/CSE style

WikiPatents contributors. 18062502. METHOD OF FORMING LOW-RESISTIVITY RU ALD THROUGH A BI-LAYER PROCESS AND RELATED STRUCTURES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 4, 06:07 UTC [cited 2024 Jun 9]. Available from: http://wikipatents.org/index.php?title=18062502._METHOD_OF_FORMING_LOW-RESISTIVITY_RU_ALD_THROUGH_A_BI-LAYER_PROCESS_AND_RELATED_STRUCTURES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25464.

Bluebook style

18062502. METHOD OF FORMING LOW-RESISTIVITY RU ALD THROUGH A BI-LAYER PROCESS AND RELATED STRUCTURES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=18062502._METHOD_OF_FORMING_LOW-RESISTIVITY_RU_ALD_THROUGH_A_BI-LAYER_PROCESS_AND_RELATED_STRUCTURES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25464 (last visited June 9, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18062502. METHOD OF FORMING LOW-RESISTIVITY RU ALD THROUGH A BI-LAYER PROCESS AND RELATED STRUCTURES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18062502._METHOD_OF_FORMING_LOW-RESISTIVITY_RU_ALD_THROUGH_A_BI-LAYER_PROCESS_AND_RELATED_STRUCTURES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25464",
   note = "[Online; accessed 9-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18062502. METHOD OF FORMING LOW-RESISTIVITY RU ALD THROUGH A BI-LAYER PROCESS AND RELATED STRUCTURES simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18062502._METHOD_OF_FORMING_LOW-RESISTIVITY_RU_ALD_THROUGH_A_BI-LAYER_PROCESS_AND_RELATED_STRUCTURES_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=25464}",
   note = "[Online; accessed 9-June-2024]"
 }


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