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Bibliographic details for 18100409. METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGRAPHIC TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

Citation styles for 18100409. METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGRAPHIC TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

APA style

18100409. METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGRAPHIC TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, January 4). WikiPatents, . Retrieved 13:08, June 7, 2024 from http://wikipatents.org/index.php?title=18100409._METHODS_AND_APPARATUS_FOR_REDUCING_HYDROGEN_PERMEATION_FROM_LITHOGRAPHIC_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25179.

MLA style

"18100409. METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGRAPHIC TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 4 Jan 2024, 05:28 UTC. 7 Jun 2024, 13:08 <http://wikipatents.org/index.php?title=18100409._METHODS_AND_APPARATUS_FOR_REDUCING_HYDROGEN_PERMEATION_FROM_LITHOGRAPHIC_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25179>.

MHRA style

WikiPatents contributors, '18100409. METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGRAPHIC TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 4 January 2024, 05:28 UTC, <http://wikipatents.org/index.php?title=18100409._METHODS_AND_APPARATUS_FOR_REDUCING_HYDROGEN_PERMEATION_FROM_LITHOGRAPHIC_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25179> [accessed 7 June 2024]

Chicago style

WikiPatents contributors, "18100409. METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGRAPHIC TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18100409._METHODS_AND_APPARATUS_FOR_REDUCING_HYDROGEN_PERMEATION_FROM_LITHOGRAPHIC_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25179 (accessed June 7, 2024).

CBE/CSE style

WikiPatents contributors. 18100409. METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGRAPHIC TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jan 4, 05:28 UTC [cited 2024 Jun 7]. Available from: http://wikipatents.org/index.php?title=18100409._METHODS_AND_APPARATUS_FOR_REDUCING_HYDROGEN_PERMEATION_FROM_LITHOGRAPHIC_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25179.

Bluebook style

18100409. METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGRAPHIC TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=18100409._METHODS_AND_APPARATUS_FOR_REDUCING_HYDROGEN_PERMEATION_FROM_LITHOGRAPHIC_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25179 (last visited June 7, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18100409. METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGRAPHIC TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18100409._METHODS_AND_APPARATUS_FOR_REDUCING_HYDROGEN_PERMEATION_FROM_LITHOGRAPHIC_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25179",
   note = "[Online; accessed 7-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18100409. METHODS AND APPARATUS FOR REDUCING HYDROGEN PERMEATION FROM LITHOGRAPHIC TOOL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18100409._METHODS_AND_APPARATUS_FOR_REDUCING_HYDROGEN_PERMEATION_FROM_LITHOGRAPHIC_TOOL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25179}",
   note = "[Online; accessed 7-June-2024]"
 }


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