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Bibliographic details for 17736772. MANUFACTURING METHOD OF EUV PHOTO MASKS simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

Citation styles for 17736772. MANUFACTURING METHOD OF EUV PHOTO MASKS simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

APA style

17736772. MANUFACTURING METHOD OF EUV PHOTO MASKS simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, January 4). WikiPatents, . Retrieved 14:21, June 8, 2024 from http://wikipatents.org/index.php?title=17736772._MANUFACTURING_METHOD_OF_EUV_PHOTO_MASKS_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25176.

MLA style

"17736772. MANUFACTURING METHOD OF EUV PHOTO MASKS simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 4 Jan 2024, 05:28 UTC. 8 Jun 2024, 14:21 <http://wikipatents.org/index.php?title=17736772._MANUFACTURING_METHOD_OF_EUV_PHOTO_MASKS_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25176>.

MHRA style

WikiPatents contributors, '17736772. MANUFACTURING METHOD OF EUV PHOTO MASKS simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 4 January 2024, 05:28 UTC, <http://wikipatents.org/index.php?title=17736772._MANUFACTURING_METHOD_OF_EUV_PHOTO_MASKS_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25176> [accessed 8 June 2024]

Chicago style

WikiPatents contributors, "17736772. MANUFACTURING METHOD OF EUV PHOTO MASKS simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17736772._MANUFACTURING_METHOD_OF_EUV_PHOTO_MASKS_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25176 (accessed June 8, 2024).

CBE/CSE style

WikiPatents contributors. 17736772. MANUFACTURING METHOD OF EUV PHOTO MASKS simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jan 4, 05:28 UTC [cited 2024 Jun 8]. Available from: http://wikipatents.org/index.php?title=17736772._MANUFACTURING_METHOD_OF_EUV_PHOTO_MASKS_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25176.

Bluebook style

17736772. MANUFACTURING METHOD OF EUV PHOTO MASKS simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=17736772._MANUFACTURING_METHOD_OF_EUV_PHOTO_MASKS_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25176 (last visited June 8, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17736772. MANUFACTURING METHOD OF EUV PHOTO MASKS simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17736772._MANUFACTURING_METHOD_OF_EUV_PHOTO_MASKS_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25176",
   note = "[Online; accessed 8-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17736772. MANUFACTURING METHOD OF EUV PHOTO MASKS simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17736772._MANUFACTURING_METHOD_OF_EUV_PHOTO_MASKS_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=25176}",
   note = "[Online; accessed 8-June-2024]"
 }


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