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Bibliographic details for 17955660. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS simplified abstract (Samsung Display Co., Ltd.)
- Page name: 17955660. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS simplified abstract (Samsung Display Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 January 2024 04:43 UTC
- Date retrieved: 10 June 2024 06:02 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17955660._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MEASURING_FILM_THICKNESS_simplified_abstract_(Samsung_Display_Co.,_Ltd.)&oldid=24808
- Page Version ID: 24808
Citation styles for 17955660. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS simplified abstract (Samsung Display Co., Ltd.)
APA style
17955660. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS simplified abstract (Samsung Display Co., Ltd.). (2024, January 4). WikiPatents, . Retrieved 06:02, June 10, 2024 from http://wikipatents.org/index.php?title=17955660._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MEASURING_FILM_THICKNESS_simplified_abstract_(Samsung_Display_Co.,_Ltd.)&oldid=24808.
MLA style
"17955660. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS simplified abstract (Samsung Display Co., Ltd.)." WikiPatents, . 4 Jan 2024, 04:43 UTC. 10 Jun 2024, 06:02 <http://wikipatents.org/index.php?title=17955660._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MEASURING_FILM_THICKNESS_simplified_abstract_(Samsung_Display_Co.,_Ltd.)&oldid=24808>.
MHRA style
WikiPatents contributors, '17955660. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS simplified abstract (Samsung Display Co., Ltd.)', WikiPatents, , 4 January 2024, 04:43 UTC, <http://wikipatents.org/index.php?title=17955660._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MEASURING_FILM_THICKNESS_simplified_abstract_(Samsung_Display_Co.,_Ltd.)&oldid=24808> [accessed 10 June 2024]
Chicago style
WikiPatents contributors, "17955660. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS simplified abstract (Samsung Display Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17955660._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MEASURING_FILM_THICKNESS_simplified_abstract_(Samsung_Display_Co.,_Ltd.)&oldid=24808 (accessed June 10, 2024).
CBE/CSE style
WikiPatents contributors. 17955660. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS simplified abstract (Samsung Display Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 4, 04:43 UTC [cited 2024 Jun 10]. Available from: http://wikipatents.org/index.php?title=17955660._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MEASURING_FILM_THICKNESS_simplified_abstract_(Samsung_Display_Co.,_Ltd.)&oldid=24808.
Bluebook style
17955660. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS simplified abstract (Samsung Display Co., Ltd.), http://wikipatents.org/index.php?title=17955660._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MEASURING_FILM_THICKNESS_simplified_abstract_(Samsung_Display_Co.,_Ltd.)&oldid=24808 (last visited June 10, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17955660. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS simplified abstract (Samsung Display Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17955660._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MEASURING_FILM_THICKNESS_simplified_abstract_(Samsung_Display_Co.,_Ltd.)&oldid=24808", note = "[Online; accessed 10-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17955660. SUBSTRATE PROCESSING APPARATUS AND METHOD OF MEASURING FILM THICKNESS simplified abstract (Samsung Display Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17955660._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_MEASURING_FILM_THICKNESS_simplified_abstract_(Samsung_Display_Co.,_Ltd.)&oldid=24808}", note = "[Online; accessed 10-June-2024]" }