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Bibliographic details for 17674977. Deposition Apparatus and Method simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Page name: 17674977. Deposition Apparatus and Method simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 January 2024 01:58 UTC
- Date retrieved: 8 June 2024 18:03 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17674977._Deposition_Apparatus_and_Method_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23594
- Page Version ID: 23594
Citation styles for 17674977. Deposition Apparatus and Method simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
APA style
17674977. Deposition Apparatus and Method simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2024, January 4). WikiPatents, . Retrieved 18:03, June 8, 2024 from http://wikipatents.org/index.php?title=17674977._Deposition_Apparatus_and_Method_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23594.
MLA style
"17674977. Deposition Apparatus and Method simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 4 Jan 2024, 01:58 UTC. 8 Jun 2024, 18:03 <http://wikipatents.org/index.php?title=17674977._Deposition_Apparatus_and_Method_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23594>.
MHRA style
WikiPatents contributors, '17674977. Deposition Apparatus and Method simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 4 January 2024, 01:58 UTC, <http://wikipatents.org/index.php?title=17674977._Deposition_Apparatus_and_Method_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23594> [accessed 8 June 2024]
Chicago style
WikiPatents contributors, "17674977. Deposition Apparatus and Method simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17674977._Deposition_Apparatus_and_Method_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23594 (accessed June 8, 2024).
CBE/CSE style
WikiPatents contributors. 17674977. Deposition Apparatus and Method simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2024 Jan 4, 01:58 UTC [cited 2024 Jun 8]. Available from: http://wikipatents.org/index.php?title=17674977._Deposition_Apparatus_and_Method_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23594.
Bluebook style
17674977. Deposition Apparatus and Method simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=17674977._Deposition_Apparatus_and_Method_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23594 (last visited June 8, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17674977. Deposition Apparatus and Method simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17674977._Deposition_Apparatus_and_Method_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23594", note = "[Online; accessed 8-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17674977. Deposition Apparatus and Method simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17674977._Deposition_Apparatus_and_Method_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=23594}", note = "[Online; accessed 8-June-2024]" }