Cite This Page

Jump to navigation Jump to search

Bibliographic details for 18098330. WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 18098330. WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

18098330. WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 4). WikiPatents, . Retrieved 08:24, May 23, 2024 from http://wikipatents.org/index.php?title=18098330._WAFER_CLEANING_APPARATUS,_METHOD_FOR_CLEANING_WAFER_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=23024.

MLA style

"18098330. WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 4 Jan 2024, 00:45 UTC. 23 May 2024, 08:24 <http://wikipatents.org/index.php?title=18098330._WAFER_CLEANING_APPARATUS,_METHOD_FOR_CLEANING_WAFER_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=23024>.

MHRA style

WikiPatents contributors, '18098330. WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 4 January 2024, 00:45 UTC, <http://wikipatents.org/index.php?title=18098330._WAFER_CLEANING_APPARATUS,_METHOD_FOR_CLEANING_WAFER_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=23024> [accessed 23 May 2024]

Chicago style

WikiPatents contributors, "18098330. WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=18098330._WAFER_CLEANING_APPARATUS,_METHOD_FOR_CLEANING_WAFER_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=23024 (accessed May 23, 2024).

CBE/CSE style

WikiPatents contributors. 18098330. WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 4, 00:45 UTC [cited 2024 May 23]. Available from: http://wikipatents.org/index.php?title=18098330._WAFER_CLEANING_APPARATUS,_METHOD_FOR_CLEANING_WAFER_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=23024.

Bluebook style

18098330. WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=18098330._WAFER_CLEANING_APPARATUS,_METHOD_FOR_CLEANING_WAFER_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=23024 (last visited May 23, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18098330. WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=18098330._WAFER_CLEANING_APPARATUS,_METHOD_FOR_CLEANING_WAFER_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=23024",
   note = "[Online; accessed 23-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18098330. WAFER CLEANING APPARATUS, METHOD FOR CLEANING WAFER AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=18098330._WAFER_CLEANING_APPARATUS,_METHOD_FOR_CLEANING_WAFER_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=23024}",
   note = "[Online; accessed 23-May-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"