Cite This Page

Jump to navigation Jump to search

Bibliographic details for 17967228. ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

Citation styles for 17967228. ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)

APA style

17967228. ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 4). WikiPatents, . Retrieved 21:00, June 5, 2024 from http://wikipatents.org/index.php?title=17967228._ELLIPSOMETER_AND_APPARATUS_FOR_INSPECTING_SEMICONDUCTOR_DEVICE_INCLUDING_THE_ELLIPSOMETER_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22886.

MLA style

"17967228. ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 4 Jan 2024, 00:30 UTC. 5 Jun 2024, 21:00 <http://wikipatents.org/index.php?title=17967228._ELLIPSOMETER_AND_APPARATUS_FOR_INSPECTING_SEMICONDUCTOR_DEVICE_INCLUDING_THE_ELLIPSOMETER_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22886>.

MHRA style

WikiPatents contributors, '17967228. ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 4 January 2024, 00:30 UTC, <http://wikipatents.org/index.php?title=17967228._ELLIPSOMETER_AND_APPARATUS_FOR_INSPECTING_SEMICONDUCTOR_DEVICE_INCLUDING_THE_ELLIPSOMETER_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22886> [accessed 5 June 2024]

Chicago style

WikiPatents contributors, "17967228. ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17967228._ELLIPSOMETER_AND_APPARATUS_FOR_INSPECTING_SEMICONDUCTOR_DEVICE_INCLUDING_THE_ELLIPSOMETER_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22886 (accessed June 5, 2024).

CBE/CSE style

WikiPatents contributors. 17967228. ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 4, 00:30 UTC [cited 2024 Jun 5]. Available from: http://wikipatents.org/index.php?title=17967228._ELLIPSOMETER_AND_APPARATUS_FOR_INSPECTING_SEMICONDUCTOR_DEVICE_INCLUDING_THE_ELLIPSOMETER_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22886.

Bluebook style

17967228. ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=17967228._ELLIPSOMETER_AND_APPARATUS_FOR_INSPECTING_SEMICONDUCTOR_DEVICE_INCLUDING_THE_ELLIPSOMETER_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22886 (last visited June 5, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17967228. ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17967228._ELLIPSOMETER_AND_APPARATUS_FOR_INSPECTING_SEMICONDUCTOR_DEVICE_INCLUDING_THE_ELLIPSOMETER_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22886",
   note = "[Online; accessed 5-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17967228. ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17967228._ELLIPSOMETER_AND_APPARATUS_FOR_INSPECTING_SEMICONDUCTOR_DEVICE_INCLUDING_THE_ELLIPSOMETER_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=22886}",
   note = "[Online; accessed 5-June-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"