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Bibliographic details for 17461744. LITHOGRAPHY CONTAMINATION CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- Page name: 17461744. LITHOGRAPHY CONTAMINATION CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 2 January 2024 04:55 UTC
- Date retrieved: 23 May 2024 06:13 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17461744._LITHOGRAPHY_CONTAMINATION_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20316
- Page Version ID: 20316
Citation styles for 17461744. LITHOGRAPHY CONTAMINATION CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
APA style
17461744. LITHOGRAPHY CONTAMINATION CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, January 2). WikiPatents, . Retrieved 06:13, May 23, 2024 from http://wikipatents.org/index.php?title=17461744._LITHOGRAPHY_CONTAMINATION_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20316.
MLA style
"17461744. LITHOGRAPHY CONTAMINATION CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 2 Jan 2024, 04:55 UTC. 23 May 2024, 06:13 <http://wikipatents.org/index.php?title=17461744._LITHOGRAPHY_CONTAMINATION_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20316>.
MHRA style
WikiPatents contributors, '17461744. LITHOGRAPHY CONTAMINATION CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 2 January 2024, 04:55 UTC, <http://wikipatents.org/index.php?title=17461744._LITHOGRAPHY_CONTAMINATION_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20316> [accessed 23 May 2024]
Chicago style
WikiPatents contributors, "17461744. LITHOGRAPHY CONTAMINATION CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17461744._LITHOGRAPHY_CONTAMINATION_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20316 (accessed May 23, 2024).
CBE/CSE style
WikiPatents contributors. 17461744. LITHOGRAPHY CONTAMINATION CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 04:55 UTC [cited 2024 May 23]. Available from: http://wikipatents.org/index.php?title=17461744._LITHOGRAPHY_CONTAMINATION_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20316.
Bluebook style
17461744. LITHOGRAPHY CONTAMINATION CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=17461744._LITHOGRAPHY_CONTAMINATION_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20316 (last visited May 23, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17461744. LITHOGRAPHY CONTAMINATION CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17461744._LITHOGRAPHY_CONTAMINATION_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20316",
note = "[Online; accessed 23-May-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17461744. LITHOGRAPHY CONTAMINATION CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17461744._LITHOGRAPHY_CONTAMINATION_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=20316}",
note = "[Online; accessed 23-May-2024]"
}
