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Bibliographic details for 17872178. CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)

Citation styles for 17872178. CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)

APA style

17872178. CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA). (2024, January 2). WikiPatents, . Retrieved 00:45, May 29, 2024 from http://wikipatents.org/index.php?title=17872178._CONTROL_DEVICE,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=20000.

MLA style

"17872178. CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)." WikiPatents, . 2 Jan 2024, 03:54 UTC. 29 May 2024, 00:45 <http://wikipatents.org/index.php?title=17872178._CONTROL_DEVICE,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=20000>.

MHRA style

WikiPatents contributors, '17872178. CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)', WikiPatents, , 2 January 2024, 03:54 UTC, <http://wikipatents.org/index.php?title=17872178._CONTROL_DEVICE,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=20000> [accessed 29 May 2024]

Chicago style

WikiPatents contributors, "17872178. CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA)," WikiPatents, , http://wikipatents.org/index.php?title=17872178._CONTROL_DEVICE,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=20000 (accessed May 29, 2024).

CBE/CSE style

WikiPatents contributors. 17872178. CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA) [Internet]. WikiPatents, ; 2024 Jan 2, 03:54 UTC [cited 2024 May 29]. Available from: http://wikipatents.org/index.php?title=17872178._CONTROL_DEVICE,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=20000.

Bluebook style

17872178. CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA), http://wikipatents.org/index.php?title=17872178._CONTROL_DEVICE,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=20000 (last visited May 29, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17872178. CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17872178._CONTROL_DEVICE,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=20000",
   note = "[Online; accessed 29-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17872178. CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD simplified abstract (CANON KABUSHIKI KAISHA) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17872178._CONTROL_DEVICE,_LITHOGRAPHY_APPARATUS,_AND_ARTICLE_MANUFACTURING_METHOD_simplified_abstract_(CANON_KABUSHIKI_KAISHA)&oldid=20000}",
   note = "[Online; accessed 29-May-2024]"
 }


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