Cite This Page
Bibliographic details for 17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- Page name: 17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 2 January 2024 02:56 UTC
- Date retrieved: 1 June 2024 06:38 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509
- Page Version ID: 19509
Citation styles for 17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)
APA style
17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, January 2). WikiPatents, . Retrieved 06:38, June 1, 2024 from http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509.
MLA style
"17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 2 Jan 2024, 02:56 UTC. 1 Jun 2024, 06:38 <http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509>.
MHRA style
WikiPatents contributors, '17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 2 January 2024, 02:56 UTC, <http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509> [accessed 1 June 2024]
Chicago style
WikiPatents contributors, "17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509 (accessed June 1, 2024).
CBE/CSE style
WikiPatents contributors. 17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 02:56 UTC [cited 2024 Jun 1]. Available from: http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509.
Bluebook style
17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509 (last visited June 1, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509", note = "[Online; accessed 1-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17377634. METHOD FOR IMPROVED POLYSILICON ETCH DIMENSIONAL CONTROL simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17377634._METHOD_FOR_IMPROVED_POLYSILICON_ETCH_DIMENSIONAL_CONTROL_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19509}", note = "[Online; accessed 1-June-2024]" }