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Bibliographic details for 17568176. CRITICAL DIMENSION UNIFORMITY (CDU) CONTROL METHOD AND SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

Citation styles for 17568176. CRITICAL DIMENSION UNIFORMITY (CDU) CONTROL METHOD AND SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)

APA style

17568176. CRITICAL DIMENSION UNIFORMITY (CDU) CONTROL METHOD AND SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.). (2024, January 2). WikiPatents, . Retrieved 18:34, May 28, 2024 from http://wikipatents.org/index.php?title=17568176._CRITICAL_DIMENSION_UNIFORMITY_(CDU)_CONTROL_METHOD_AND_SEMICONDUCTOR_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19494.

MLA style

"17568176. CRITICAL DIMENSION UNIFORMITY (CDU) CONTROL METHOD AND SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)." WikiPatents, . 2 Jan 2024, 02:55 UTC. 28 May 2024, 18:34 <http://wikipatents.org/index.php?title=17568176._CRITICAL_DIMENSION_UNIFORMITY_(CDU)_CONTROL_METHOD_AND_SEMICONDUCTOR_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19494>.

MHRA style

WikiPatents contributors, '17568176. CRITICAL DIMENSION UNIFORMITY (CDU) CONTROL METHOD AND SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)', WikiPatents, , 2 January 2024, 02:55 UTC, <http://wikipatents.org/index.php?title=17568176._CRITICAL_DIMENSION_UNIFORMITY_(CDU)_CONTROL_METHOD_AND_SEMICONDUCTOR_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19494> [accessed 28 May 2024]

Chicago style

WikiPatents contributors, "17568176. CRITICAL DIMENSION UNIFORMITY (CDU) CONTROL METHOD AND SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17568176._CRITICAL_DIMENSION_UNIFORMITY_(CDU)_CONTROL_METHOD_AND_SEMICONDUCTOR_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19494 (accessed May 28, 2024).

CBE/CSE style

WikiPatents contributors. 17568176. CRITICAL DIMENSION UNIFORMITY (CDU) CONTROL METHOD AND SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 02:55 UTC [cited 2024 May 28]. Available from: http://wikipatents.org/index.php?title=17568176._CRITICAL_DIMENSION_UNIFORMITY_(CDU)_CONTROL_METHOD_AND_SEMICONDUCTOR_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19494.

Bluebook style

17568176. CRITICAL DIMENSION UNIFORMITY (CDU) CONTROL METHOD AND SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.), http://wikipatents.org/index.php?title=17568176._CRITICAL_DIMENSION_UNIFORMITY_(CDU)_CONTROL_METHOD_AND_SEMICONDUCTOR_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19494 (last visited May 28, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17568176. CRITICAL DIMENSION UNIFORMITY (CDU) CONTROL METHOD AND SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17568176._CRITICAL_DIMENSION_UNIFORMITY_(CDU)_CONTROL_METHOD_AND_SEMICONDUCTOR_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19494",
   note = "[Online; accessed 28-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17568176. CRITICAL DIMENSION UNIFORMITY (CDU) CONTROL METHOD AND SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM simplified abstract (TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17568176._CRITICAL_DIMENSION_UNIFORMITY_(CDU)_CONTROL_METHOD_AND_SEMICONDUCTOR_SUBSTRATE_PROCESSING_SYSTEM_simplified_abstract_(TAIWAN_SEMICONDUCTOR_MANUFACTURING_COMPANY,_LTD.)&oldid=19494}",
   note = "[Online; accessed 28-May-2024]"
 }


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