Cite This Page
Bibliographic details for 17684052. APPARATUS FOR INSPECTING SUBSTRATE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Page name: 17684052. APPARATUS FOR INSPECTING SUBSTRATE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 2 January 2024 02:31 UTC
- Date retrieved: 3 June 2024 14:25 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17684052._APPARATUS_FOR_INSPECTING_SUBSTRATE_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19273
- Page Version ID: 19273
Citation styles for 17684052. APPARATUS FOR INSPECTING SUBSTRATE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
APA style
17684052. APPARATUS FOR INSPECTING SUBSTRATE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 2). WikiPatents, . Retrieved 14:25, June 3, 2024 from http://wikipatents.org/index.php?title=17684052._APPARATUS_FOR_INSPECTING_SUBSTRATE_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19273.
MLA style
"17684052. APPARATUS FOR INSPECTING SUBSTRATE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 2 Jan 2024, 02:31 UTC. 3 Jun 2024, 14:25 <http://wikipatents.org/index.php?title=17684052._APPARATUS_FOR_INSPECTING_SUBSTRATE_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19273>.
MHRA style
WikiPatents contributors, '17684052. APPARATUS FOR INSPECTING SUBSTRATE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 2 January 2024, 02:31 UTC, <http://wikipatents.org/index.php?title=17684052._APPARATUS_FOR_INSPECTING_SUBSTRATE_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19273> [accessed 3 June 2024]
Chicago style
WikiPatents contributors, "17684052. APPARATUS FOR INSPECTING SUBSTRATE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17684052._APPARATUS_FOR_INSPECTING_SUBSTRATE_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19273 (accessed June 3, 2024).
CBE/CSE style
WikiPatents contributors. 17684052. APPARATUS FOR INSPECTING SUBSTRATE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 02:31 UTC [cited 2024 Jun 3]. Available from: http://wikipatents.org/index.php?title=17684052._APPARATUS_FOR_INSPECTING_SUBSTRATE_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19273.
Bluebook style
17684052. APPARATUS FOR INSPECTING SUBSTRATE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=17684052._APPARATUS_FOR_INSPECTING_SUBSTRATE_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19273 (last visited June 3, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17684052. APPARATUS FOR INSPECTING SUBSTRATE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17684052._APPARATUS_FOR_INSPECTING_SUBSTRATE_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19273", note = "[Online; accessed 3-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17684052. APPARATUS FOR INSPECTING SUBSTRATE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17684052._APPARATUS_FOR_INSPECTING_SUBSTRATE_AND_METHOD_FOR_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19273}", note = "[Online; accessed 3-June-2024]" }