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Bibliographic details for 17586189. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Page name: 17586189. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 2 January 2024 00:59 UTC
- Date retrieved: 3 June 2024 20:24 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17586189._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19054
- Page Version ID: 19054
Citation styles for 17586189. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)
APA style
17586189. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.). (2024, January 2). WikiPatents, . Retrieved 20:24, June 3, 2024 from http://wikipatents.org/index.php?title=17586189._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19054.
MLA style
"17586189. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)." WikiPatents, . 2 Jan 2024, 00:59 UTC. 3 Jun 2024, 20:24 <http://wikipatents.org/index.php?title=17586189._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19054>.
MHRA style
WikiPatents contributors, '17586189. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)', WikiPatents, , 2 January 2024, 00:59 UTC, <http://wikipatents.org/index.php?title=17586189._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19054> [accessed 3 June 2024]
Chicago style
WikiPatents contributors, "17586189. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.)," WikiPatents, , http://wikipatents.org/index.php?title=17586189._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19054 (accessed June 3, 2024).
CBE/CSE style
WikiPatents contributors. 17586189. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) [Internet]. WikiPatents, ; 2024 Jan 2, 00:59 UTC [cited 2024 Jun 3]. Available from: http://wikipatents.org/index.php?title=17586189._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19054.
Bluebook style
17586189. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.), http://wikipatents.org/index.php?title=17586189._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19054 (last visited June 3, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17586189. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17586189._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19054", note = "[Online; accessed 3-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17586189. OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME simplified abstract (SAMSUNG ELECTRONICS CO., LTD.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17586189._OPTICAL_MEASUREMENT_APPARATUS,_MEASURING_METHOD_USING_THE_SAME,_AND_METHOD_OF_FABRICATING_SEMICONDUCTOR_DEVICE_USING_THE_SAME_simplified_abstract_(SAMSUNG_ELECTRONICS_CO.,_LTD.)&oldid=19054}", note = "[Online; accessed 3-June-2024]" }