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Bibliographic details for 17837543. PATTERNING LAYER MODIFICATION USING DIRECTIONAL RADICAL RIBBON BEAM simplified abstract (Applied Materials, Inc.)

Citation styles for 17837543. PATTERNING LAYER MODIFICATION USING DIRECTIONAL RADICAL RIBBON BEAM simplified abstract (Applied Materials, Inc.)

APA style

17837543. PATTERNING LAYER MODIFICATION USING DIRECTIONAL RADICAL RIBBON BEAM simplified abstract (Applied Materials, Inc.). (2024, January 1). WikiPatents, . Retrieved 23:03, June 8, 2024 from http://wikipatents.org/index.php?title=17837543._PATTERNING_LAYER_MODIFICATION_USING_DIRECTIONAL_RADICAL_RIBBON_BEAM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18970.

MLA style

"17837543. PATTERNING LAYER MODIFICATION USING DIRECTIONAL RADICAL RIBBON BEAM simplified abstract (Applied Materials, Inc.)." WikiPatents, . 1 Jan 2024, 18:39 UTC. 8 Jun 2024, 23:03 <http://wikipatents.org/index.php?title=17837543._PATTERNING_LAYER_MODIFICATION_USING_DIRECTIONAL_RADICAL_RIBBON_BEAM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18970>.

MHRA style

WikiPatents contributors, '17837543. PATTERNING LAYER MODIFICATION USING DIRECTIONAL RADICAL RIBBON BEAM simplified abstract (Applied Materials, Inc.)', WikiPatents, , 1 January 2024, 18:39 UTC, <http://wikipatents.org/index.php?title=17837543._PATTERNING_LAYER_MODIFICATION_USING_DIRECTIONAL_RADICAL_RIBBON_BEAM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18970> [accessed 8 June 2024]

Chicago style

WikiPatents contributors, "17837543. PATTERNING LAYER MODIFICATION USING DIRECTIONAL RADICAL RIBBON BEAM simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=17837543._PATTERNING_LAYER_MODIFICATION_USING_DIRECTIONAL_RADICAL_RIBBON_BEAM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18970 (accessed June 8, 2024).

CBE/CSE style

WikiPatents contributors. 17837543. PATTERNING LAYER MODIFICATION USING DIRECTIONAL RADICAL RIBBON BEAM simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Jan 1, 18:39 UTC [cited 2024 Jun 8]. Available from: http://wikipatents.org/index.php?title=17837543._PATTERNING_LAYER_MODIFICATION_USING_DIRECTIONAL_RADICAL_RIBBON_BEAM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18970.

Bluebook style

17837543. PATTERNING LAYER MODIFICATION USING DIRECTIONAL RADICAL RIBBON BEAM simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=17837543._PATTERNING_LAYER_MODIFICATION_USING_DIRECTIONAL_RADICAL_RIBBON_BEAM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18970 (last visited June 8, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17837543. PATTERNING LAYER MODIFICATION USING DIRECTIONAL RADICAL RIBBON BEAM simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17837543._PATTERNING_LAYER_MODIFICATION_USING_DIRECTIONAL_RADICAL_RIBBON_BEAM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18970",
   note = "[Online; accessed 8-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17837543. PATTERNING LAYER MODIFICATION USING DIRECTIONAL RADICAL RIBBON BEAM simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17837543._PATTERNING_LAYER_MODIFICATION_USING_DIRECTIONAL_RADICAL_RIBBON_BEAM_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18970}",
   note = "[Online; accessed 8-June-2024]"
 }


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