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Bibliographic details for 17836657. PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL simplified abstract (Applied Materials, Inc.)
- Page name: 17836657. PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL simplified abstract (Applied Materials, Inc.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 1 January 2024 18:39 UTC
- Date retrieved: 8 June 2024 21:00 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17836657._PLASMA_PRECLEAN_SYSTEM_FOR_CLUSTER_TOOL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18966
- Page Version ID: 18966
Citation styles for 17836657. PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL simplified abstract (Applied Materials, Inc.)
APA style
17836657. PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL simplified abstract (Applied Materials, Inc.). (2024, January 1). WikiPatents, . Retrieved 21:00, June 8, 2024 from http://wikipatents.org/index.php?title=17836657._PLASMA_PRECLEAN_SYSTEM_FOR_CLUSTER_TOOL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18966.
MLA style
"17836657. PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL simplified abstract (Applied Materials, Inc.)." WikiPatents, . 1 Jan 2024, 18:39 UTC. 8 Jun 2024, 21:00 <http://wikipatents.org/index.php?title=17836657._PLASMA_PRECLEAN_SYSTEM_FOR_CLUSTER_TOOL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18966>.
MHRA style
WikiPatents contributors, '17836657. PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL simplified abstract (Applied Materials, Inc.)', WikiPatents, , 1 January 2024, 18:39 UTC, <http://wikipatents.org/index.php?title=17836657._PLASMA_PRECLEAN_SYSTEM_FOR_CLUSTER_TOOL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18966> [accessed 8 June 2024]
Chicago style
WikiPatents contributors, "17836657. PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL simplified abstract (Applied Materials, Inc.)," WikiPatents, , http://wikipatents.org/index.php?title=17836657._PLASMA_PRECLEAN_SYSTEM_FOR_CLUSTER_TOOL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18966 (accessed June 8, 2024).
CBE/CSE style
WikiPatents contributors. 17836657. PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL simplified abstract (Applied Materials, Inc.) [Internet]. WikiPatents, ; 2024 Jan 1, 18:39 UTC [cited 2024 Jun 8]. Available from: http://wikipatents.org/index.php?title=17836657._PLASMA_PRECLEAN_SYSTEM_FOR_CLUSTER_TOOL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18966.
Bluebook style
17836657. PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL simplified abstract (Applied Materials, Inc.), http://wikipatents.org/index.php?title=17836657._PLASMA_PRECLEAN_SYSTEM_FOR_CLUSTER_TOOL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18966 (last visited June 8, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17836657. PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "http://wikipatents.org/index.php?title=17836657._PLASMA_PRECLEAN_SYSTEM_FOR_CLUSTER_TOOL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18966",
note = "[Online; accessed 8-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17836657. PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL simplified abstract (Applied Materials, Inc.) --- WikiPatents{,} ",
year = "2024",
url = "\url{http://wikipatents.org/index.php?title=17836657._PLASMA_PRECLEAN_SYSTEM_FOR_CLUSTER_TOOL_simplified_abstract_(Applied_Materials,_Inc.)&oldid=18966}",
note = "[Online; accessed 8-June-2024]"
}
