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Bibliographic details for 17809025. METAL LAYER PROTECTION DURING WET ETCHING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- Page name: 17809025. METAL LAYER PROTECTION DURING WET ETCHING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 1 January 2024 17:37 UTC
- Date retrieved: 3 June 2024 12:21 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17809025._METAL_LAYER_PROTECTION_DURING_WET_ETCHING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17950
- Page Version ID: 17950
Citation styles for 17809025. METAL LAYER PROTECTION DURING WET ETCHING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)
APA style
17809025. METAL LAYER PROTECTION DURING WET ETCHING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.). (2024, January 1). WikiPatents, . Retrieved 12:21, June 3, 2024 from http://wikipatents.org/index.php?title=17809025._METAL_LAYER_PROTECTION_DURING_WET_ETCHING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17950.
MLA style
"17809025. METAL LAYER PROTECTION DURING WET ETCHING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)." WikiPatents, . 1 Jan 2024, 17:37 UTC. 3 Jun 2024, 12:21 <http://wikipatents.org/index.php?title=17809025._METAL_LAYER_PROTECTION_DURING_WET_ETCHING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17950>.
MHRA style
WikiPatents contributors, '17809025. METAL LAYER PROTECTION DURING WET ETCHING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)', WikiPatents, , 1 January 2024, 17:37 UTC, <http://wikipatents.org/index.php?title=17809025._METAL_LAYER_PROTECTION_DURING_WET_ETCHING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17950> [accessed 3 June 2024]
Chicago style
WikiPatents contributors, "17809025. METAL LAYER PROTECTION DURING WET ETCHING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17809025._METAL_LAYER_PROTECTION_DURING_WET_ETCHING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17950 (accessed June 3, 2024).
CBE/CSE style
WikiPatents contributors. 17809025. METAL LAYER PROTECTION DURING WET ETCHING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) [Internet]. WikiPatents, ; 2024 Jan 1, 17:37 UTC [cited 2024 Jun 3]. Available from: http://wikipatents.org/index.php?title=17809025._METAL_LAYER_PROTECTION_DURING_WET_ETCHING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17950.
Bluebook style
17809025. METAL LAYER PROTECTION DURING WET ETCHING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.), http://wikipatents.org/index.php?title=17809025._METAL_LAYER_PROTECTION_DURING_WET_ETCHING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17950 (last visited June 3, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17809025. METAL LAYER PROTECTION DURING WET ETCHING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ", year = "2024", url = "http://wikipatents.org/index.php?title=17809025._METAL_LAYER_PROTECTION_DURING_WET_ETCHING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17950", note = "[Online; accessed 3-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17809025. METAL LAYER PROTECTION DURING WET ETCHING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ", year = "2024", url = "\url{http://wikipatents.org/index.php?title=17809025._METAL_LAYER_PROTECTION_DURING_WET_ETCHING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17950}", note = "[Online; accessed 3-June-2024]" }