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Citation styles for 17847863. METHOD FOR FORMING A CONTACT PLUG WITH IMPROVED CONTACT METAL SEALING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)

APA style

17847863. METHOD FOR FORMING A CONTACT PLUG WITH IMPROVED CONTACT METAL SEALING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.). (2024, January 1). WikiPatents, . Retrieved 23:51, May 31, 2024 from http://wikipatents.org/index.php?title=17847863._METHOD_FOR_FORMING_A_CONTACT_PLUG_WITH_IMPROVED_CONTACT_METAL_SEALING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17907.

MLA style

"17847863. METHOD FOR FORMING A CONTACT PLUG WITH IMPROVED CONTACT METAL SEALING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)." WikiPatents, . 1 Jan 2024, 17:35 UTC. 31 May 2024, 23:51 <http://wikipatents.org/index.php?title=17847863._METHOD_FOR_FORMING_A_CONTACT_PLUG_WITH_IMPROVED_CONTACT_METAL_SEALING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17907>.

MHRA style

WikiPatents contributors, '17847863. METHOD FOR FORMING A CONTACT PLUG WITH IMPROVED CONTACT METAL SEALING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)', WikiPatents, , 1 January 2024, 17:35 UTC, <http://wikipatents.org/index.php?title=17847863._METHOD_FOR_FORMING_A_CONTACT_PLUG_WITH_IMPROVED_CONTACT_METAL_SEALING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17907> [accessed 31 May 2024]

Chicago style

WikiPatents contributors, "17847863. METHOD FOR FORMING A CONTACT PLUG WITH IMPROVED CONTACT METAL SEALING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17847863._METHOD_FOR_FORMING_A_CONTACT_PLUG_WITH_IMPROVED_CONTACT_METAL_SEALING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17907 (accessed May 31, 2024).

CBE/CSE style

WikiPatents contributors. 17847863. METHOD FOR FORMING A CONTACT PLUG WITH IMPROVED CONTACT METAL SEALING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) [Internet]. WikiPatents, ; 2024 Jan 1, 17:35 UTC [cited 2024 May 31]. Available from: http://wikipatents.org/index.php?title=17847863._METHOD_FOR_FORMING_A_CONTACT_PLUG_WITH_IMPROVED_CONTACT_METAL_SEALING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17907.

Bluebook style

17847863. METHOD FOR FORMING A CONTACT PLUG WITH IMPROVED CONTACT METAL SEALING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.), http://wikipatents.org/index.php?title=17847863._METHOD_FOR_FORMING_A_CONTACT_PLUG_WITH_IMPROVED_CONTACT_METAL_SEALING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17907 (last visited May 31, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17847863. METHOD FOR FORMING A CONTACT PLUG WITH IMPROVED CONTACT METAL SEALING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "http://wikipatents.org/index.php?title=17847863._METHOD_FOR_FORMING_A_CONTACT_PLUG_WITH_IMPROVED_CONTACT_METAL_SEALING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17907",
   note = "[Online; accessed 31-May-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17847863. METHOD FOR FORMING A CONTACT PLUG WITH IMPROVED CONTACT METAL SEALING simplified abstract (Taiwan Semiconductor Manufacturing Company, Ltd.) --- WikiPatents{,} ",
   year = "2024",
   url = "\url{http://wikipatents.org/index.php?title=17847863._METHOD_FOR_FORMING_A_CONTACT_PLUG_WITH_IMPROVED_CONTACT_METAL_SEALING_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Company,_Ltd.)&oldid=17907}",
   note = "[Online; accessed 31-May-2024]"
 }