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Bibliographic details for 17838994. DEEP TRENCH ISOLATION STRUCTURE AND METHODS FOR FABRICATION THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Page name: 17838994. DEEP TRENCH ISOLATION STRUCTURE AND METHODS FOR FABRICATION THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 14 December 2023 12:45 UTC
- Date retrieved: 9 June 2024 21:51 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17838994._DEEP_TRENCH_ISOLATION_STRUCTURE_AND_METHODS_FOR_FABRICATION_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16187
- Page Version ID: 16187
Citation styles for 17838994. DEEP TRENCH ISOLATION STRUCTURE AND METHODS FOR FABRICATION THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
APA style
17838994. DEEP TRENCH ISOLATION STRUCTURE AND METHODS FOR FABRICATION THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2023, December 14). WikiPatents, . Retrieved 21:51, June 9, 2024 from http://wikipatents.org/index.php?title=17838994._DEEP_TRENCH_ISOLATION_STRUCTURE_AND_METHODS_FOR_FABRICATION_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16187.
MLA style
"17838994. DEEP TRENCH ISOLATION STRUCTURE AND METHODS FOR FABRICATION THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 14 Dec 2023, 12:45 UTC. 9 Jun 2024, 21:51 <http://wikipatents.org/index.php?title=17838994._DEEP_TRENCH_ISOLATION_STRUCTURE_AND_METHODS_FOR_FABRICATION_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16187>.
MHRA style
WikiPatents contributors, '17838994. DEEP TRENCH ISOLATION STRUCTURE AND METHODS FOR FABRICATION THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 14 December 2023, 12:45 UTC, <http://wikipatents.org/index.php?title=17838994._DEEP_TRENCH_ISOLATION_STRUCTURE_AND_METHODS_FOR_FABRICATION_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16187> [accessed 9 June 2024]
Chicago style
WikiPatents contributors, "17838994. DEEP TRENCH ISOLATION STRUCTURE AND METHODS FOR FABRICATION THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17838994._DEEP_TRENCH_ISOLATION_STRUCTURE_AND_METHODS_FOR_FABRICATION_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16187 (accessed June 9, 2024).
CBE/CSE style
WikiPatents contributors. 17838994. DEEP TRENCH ISOLATION STRUCTURE AND METHODS FOR FABRICATION THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2023 Dec 14, 12:45 UTC [cited 2024 Jun 9]. Available from: http://wikipatents.org/index.php?title=17838994._DEEP_TRENCH_ISOLATION_STRUCTURE_AND_METHODS_FOR_FABRICATION_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16187.
Bluebook style
17838994. DEEP TRENCH ISOLATION STRUCTURE AND METHODS FOR FABRICATION THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=17838994._DEEP_TRENCH_ISOLATION_STRUCTURE_AND_METHODS_FOR_FABRICATION_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16187 (last visited June 9, 2024).
BibTeX entry
@misc{ wiki:xxx, author = "WikiPatents", title = "17838994. DEEP TRENCH ISOLATION STRUCTURE AND METHODS FOR FABRICATION THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ", year = "2023", url = "http://wikipatents.org/index.php?title=17838994._DEEP_TRENCH_ISOLATION_STRUCTURE_AND_METHODS_FOR_FABRICATION_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16187", note = "[Online; accessed 9-June-2024]" }
When using the LaTeX package url (\usepackage{url}
somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx, author = "WikiPatents", title = "17838994. DEEP TRENCH ISOLATION STRUCTURE AND METHODS FOR FABRICATION THEREOF simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ", year = "2023", url = "\url{http://wikipatents.org/index.php?title=17838994._DEEP_TRENCH_ISOLATION_STRUCTURE_AND_METHODS_FOR_FABRICATION_THEREOF_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16187}", note = "[Online; accessed 9-June-2024]" }