Cite This Page

Jump to navigation Jump to search

Bibliographic details for 17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

Citation styles for 17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)

APA style

17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2023, December 14). WikiPatents, . Retrieved 11:34, June 9, 2024 from http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127.

MLA style

"17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 14 Dec 2023, 12:36 UTC. 9 Jun 2024, 11:34 <http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127>.

MHRA style

WikiPatents contributors, '17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 14 December 2023, 12:36 UTC, <http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127> [accessed 9 June 2024]

Chicago style

WikiPatents contributors, "17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127 (accessed June 9, 2024).

CBE/CSE style

WikiPatents contributors. 17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2023 Dec 14, 12:36 UTC [cited 2024 Jun 9]. Available from: http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127.

Bluebook style

17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127 (last visited June 9, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127",
   note = "[Online; accessed 9-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "17837910. SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=17837910._SEMICONDUCTOR_PROCESS_CHAMBER_WITH_IMPROVED_REFLECTOR_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16127}",
   note = "[Online; accessed 9-June-2024]"
 }


Retrieved from "http://wikipatents.org/index.php?title=Special:CiteThisPage"