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Bibliographic details for 17835175. MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Page name: 17835175. MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 14 December 2023 12:36 UTC
- Date retrieved: 8 June 2024 20:01 UTC
- Permanent URL: http://wikipatents.org/index.php?title=17835175._MICRO-ELECTROMECHANICAL_SYSTEMS_(MEMS)_DEVICE_WITH_OUTGAS_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16126
- Page Version ID: 16126
Citation styles for 17835175. MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)
APA style
17835175. MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.). (2023, December 14). WikiPatents, . Retrieved 20:01, June 8, 2024 from http://wikipatents.org/index.php?title=17835175._MICRO-ELECTROMECHANICAL_SYSTEMS_(MEMS)_DEVICE_WITH_OUTGAS_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16126.
MLA style
"17835175. MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)." WikiPatents, . 14 Dec 2023, 12:36 UTC. 8 Jun 2024, 20:01 <http://wikipatents.org/index.php?title=17835175._MICRO-ELECTROMECHANICAL_SYSTEMS_(MEMS)_DEVICE_WITH_OUTGAS_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16126>.
MHRA style
WikiPatents contributors, '17835175. MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)', WikiPatents, , 14 December 2023, 12:36 UTC, <http://wikipatents.org/index.php?title=17835175._MICRO-ELECTROMECHANICAL_SYSTEMS_(MEMS)_DEVICE_WITH_OUTGAS_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16126> [accessed 8 June 2024]
Chicago style
WikiPatents contributors, "17835175. MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=17835175._MICRO-ELECTROMECHANICAL_SYSTEMS_(MEMS)_DEVICE_WITH_OUTGAS_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16126 (accessed June 8, 2024).
CBE/CSE style
WikiPatents contributors. 17835175. MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) [Internet]. WikiPatents, ; 2023 Dec 14, 12:36 UTC [cited 2024 Jun 8]. Available from: http://wikipatents.org/index.php?title=17835175._MICRO-ELECTROMECHANICAL_SYSTEMS_(MEMS)_DEVICE_WITH_OUTGAS_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16126.
Bluebook style
17835175. MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.), http://wikipatents.org/index.php?title=17835175._MICRO-ELECTROMECHANICAL_SYSTEMS_(MEMS)_DEVICE_WITH_OUTGAS_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16126 (last visited June 8, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17835175. MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=17835175._MICRO-ELECTROMECHANICAL_SYSTEMS_(MEMS)_DEVICE_WITH_OUTGAS_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16126",
note = "[Online; accessed 8-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "17835175. MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER simplified abstract (Taiwan Semiconductor Manufacturing Co., Ltd.) --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=17835175._MICRO-ELECTROMECHANICAL_SYSTEMS_(MEMS)_DEVICE_WITH_OUTGAS_LAYER_simplified_abstract_(Taiwan_Semiconductor_Manufacturing_Co.,_Ltd.)&oldid=16126}",
note = "[Online; accessed 8-June-2024]"
}
