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Bibliographic details for 18317328. EXTREME ULTRAVIOLET (EUV) PHOTOMASK simplified abstract (Samsung Electronics Co., Ltd.)
- Page name: 18317328. EXTREME ULTRAVIOLET (EUV) PHOTOMASK simplified abstract (Samsung Electronics Co., Ltd.)
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 14 December 2023 12:18 UTC
- Date retrieved: 7 June 2024 22:00 UTC
- Permanent URL: http://wikipatents.org/index.php?title=18317328._EXTREME_ULTRAVIOLET_(EUV)_PHOTOMASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16018
- Page Version ID: 16018
Citation styles for 18317328. EXTREME ULTRAVIOLET (EUV) PHOTOMASK simplified abstract (Samsung Electronics Co., Ltd.)
APA style
18317328. EXTREME ULTRAVIOLET (EUV) PHOTOMASK simplified abstract (Samsung Electronics Co., Ltd.). (2023, December 14). WikiPatents, . Retrieved 22:00, June 7, 2024 from http://wikipatents.org/index.php?title=18317328._EXTREME_ULTRAVIOLET_(EUV)_PHOTOMASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16018.
MLA style
"18317328. EXTREME ULTRAVIOLET (EUV) PHOTOMASK simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 14 Dec 2023, 12:18 UTC. 7 Jun 2024, 22:00 <http://wikipatents.org/index.php?title=18317328._EXTREME_ULTRAVIOLET_(EUV)_PHOTOMASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16018>.
MHRA style
WikiPatents contributors, '18317328. EXTREME ULTRAVIOLET (EUV) PHOTOMASK simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 14 December 2023, 12:18 UTC, <http://wikipatents.org/index.php?title=18317328._EXTREME_ULTRAVIOLET_(EUV)_PHOTOMASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16018> [accessed 7 June 2024]
Chicago style
WikiPatents contributors, "18317328. EXTREME ULTRAVIOLET (EUV) PHOTOMASK simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18317328._EXTREME_ULTRAVIOLET_(EUV)_PHOTOMASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16018 (accessed June 7, 2024).
CBE/CSE style
WikiPatents contributors. 18317328. EXTREME ULTRAVIOLET (EUV) PHOTOMASK simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2023 Dec 14, 12:18 UTC [cited 2024 Jun 7]. Available from: http://wikipatents.org/index.php?title=18317328._EXTREME_ULTRAVIOLET_(EUV)_PHOTOMASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16018.
Bluebook style
18317328. EXTREME ULTRAVIOLET (EUV) PHOTOMASK simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18317328._EXTREME_ULTRAVIOLET_(EUV)_PHOTOMASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16018 (last visited June 7, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18317328. EXTREME ULTRAVIOLET (EUV) PHOTOMASK simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=18317328._EXTREME_ULTRAVIOLET_(EUV)_PHOTOMASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16018",
note = "[Online; accessed 7-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "18317328. EXTREME ULTRAVIOLET (EUV) PHOTOMASK simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=18317328._EXTREME_ULTRAVIOLET_(EUV)_PHOTOMASK_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16018}",
note = "[Online; accessed 7-June-2024]"
}
