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Bibliographic details for 18095125. SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

Citation styles for 18095125. SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)

APA style

18095125. SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.). (2023, December 14). WikiPatents, . Retrieved 07:16, June 9, 2024 from http://wikipatents.org/index.php?title=18095125._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16005.

MLA style

"18095125. SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)." WikiPatents, . 14 Dec 2023, 12:16 UTC. 9 Jun 2024, 07:16 <http://wikipatents.org/index.php?title=18095125._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16005>.

MHRA style

WikiPatents contributors, '18095125. SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)', WikiPatents, , 14 December 2023, 12:16 UTC, <http://wikipatents.org/index.php?title=18095125._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16005> [accessed 9 June 2024]

Chicago style

WikiPatents contributors, "18095125. SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.)," WikiPatents, , http://wikipatents.org/index.php?title=18095125._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16005 (accessed June 9, 2024).

CBE/CSE style

WikiPatents contributors. 18095125. SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) [Internet]. WikiPatents, ; 2023 Dec 14, 12:16 UTC [cited 2024 Jun 9]. Available from: http://wikipatents.org/index.php?title=18095125._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16005.

Bluebook style

18095125. SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.), http://wikipatents.org/index.php?title=18095125._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16005 (last visited June 9, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18095125. SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=18095125._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16005",
   note = "[Online; accessed 9-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "18095125. SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE USING THE SAME simplified abstract (Samsung Electronics Co., Ltd.) --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=18095125._SUBSTRATE_PROCESSING_APPARATUS_AND_METHOD_OF_PROCESSING_A_SUBSTRATE_USING_THE_SAME_simplified_abstract_(Samsung_Electronics_Co.,_Ltd.)&oldid=16005}",
   note = "[Online; accessed 9-June-2024]"
 }


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