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Bibliographic details for US Patent Application 18365757. EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK simplified abstract
- Page name: US Patent Application 18365757. EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 6 December 2023 15:23 UTC
- Date retrieved: 23 May 2024 17:38 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18365757._EUV_MASK_BLANK_AND_METHOD_OF_MAKING_EUV_MASK_BLANK_simplified_abstract&oldid=15457
- Page Version ID: 15457
Citation styles for US Patent Application 18365757. EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK simplified abstract
APA style
US Patent Application 18365757. EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK simplified abstract. (2023, December 6). WikiPatents, . Retrieved 17:38, May 23, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18365757._EUV_MASK_BLANK_AND_METHOD_OF_MAKING_EUV_MASK_BLANK_simplified_abstract&oldid=15457.
MLA style
"US Patent Application 18365757. EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK simplified abstract." WikiPatents, . 6 Dec 2023, 15:23 UTC. 23 May 2024, 17:38 <http://wikipatents.org/index.php?title=US_Patent_Application_18365757._EUV_MASK_BLANK_AND_METHOD_OF_MAKING_EUV_MASK_BLANK_simplified_abstract&oldid=15457>.
MHRA style
WikiPatents contributors, 'US Patent Application 18365757. EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK simplified abstract', WikiPatents, , 6 December 2023, 15:23 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18365757._EUV_MASK_BLANK_AND_METHOD_OF_MAKING_EUV_MASK_BLANK_simplified_abstract&oldid=15457> [accessed 23 May 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18365757. EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18365757._EUV_MASK_BLANK_AND_METHOD_OF_MAKING_EUV_MASK_BLANK_simplified_abstract&oldid=15457 (accessed May 23, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18365757. EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK simplified abstract [Internet]. WikiPatents, ; 2023 Dec 6, 15:23 UTC [cited 2024 May 23]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18365757._EUV_MASK_BLANK_AND_METHOD_OF_MAKING_EUV_MASK_BLANK_simplified_abstract&oldid=15457.
Bluebook style
US Patent Application 18365757. EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18365757._EUV_MASK_BLANK_AND_METHOD_OF_MAKING_EUV_MASK_BLANK_simplified_abstract&oldid=15457 (last visited May 23, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18365757. EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_18365757._EUV_MASK_BLANK_AND_METHOD_OF_MAKING_EUV_MASK_BLANK_simplified_abstract&oldid=15457",
note = "[Online; accessed 23-May-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18365757. EUV MASK BLANK AND METHOD OF MAKING EUV MASK BLANK simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18365757._EUV_MASK_BLANK_AND_METHOD_OF_MAKING_EUV_MASK_BLANK_simplified_abstract&oldid=15457}",
note = "[Online; accessed 23-May-2024]"
}
