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Bibliographic details for US Patent Application 18447211. SYSTEM AND METHOD FOR REMOVING DEBRIS DURING CHEMICAL MECHANICAL PLANARIZATION simplified abstract

Citation styles for US Patent Application 18447211. SYSTEM AND METHOD FOR REMOVING DEBRIS DURING CHEMICAL MECHANICAL PLANARIZATION simplified abstract

APA style

US Patent Application 18447211. SYSTEM AND METHOD FOR REMOVING DEBRIS DURING CHEMICAL MECHANICAL PLANARIZATION simplified abstract. (2023, December 6). WikiPatents, . Retrieved 02:58, June 7, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18447211._SYSTEM_AND_METHOD_FOR_REMOVING_DEBRIS_DURING_CHEMICAL_MECHANICAL_PLANARIZATION_simplified_abstract&oldid=14571.

MLA style

"US Patent Application 18447211. SYSTEM AND METHOD FOR REMOVING DEBRIS DURING CHEMICAL MECHANICAL PLANARIZATION simplified abstract." WikiPatents, . 6 Dec 2023, 08:32 UTC. 7 Jun 2024, 02:58 <http://wikipatents.org/index.php?title=US_Patent_Application_18447211._SYSTEM_AND_METHOD_FOR_REMOVING_DEBRIS_DURING_CHEMICAL_MECHANICAL_PLANARIZATION_simplified_abstract&oldid=14571>.

MHRA style

WikiPatents contributors, 'US Patent Application 18447211. SYSTEM AND METHOD FOR REMOVING DEBRIS DURING CHEMICAL MECHANICAL PLANARIZATION simplified abstract', WikiPatents, , 6 December 2023, 08:32 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18447211._SYSTEM_AND_METHOD_FOR_REMOVING_DEBRIS_DURING_CHEMICAL_MECHANICAL_PLANARIZATION_simplified_abstract&oldid=14571> [accessed 7 June 2024]

Chicago style

WikiPatents contributors, "US Patent Application 18447211. SYSTEM AND METHOD FOR REMOVING DEBRIS DURING CHEMICAL MECHANICAL PLANARIZATION simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18447211._SYSTEM_AND_METHOD_FOR_REMOVING_DEBRIS_DURING_CHEMICAL_MECHANICAL_PLANARIZATION_simplified_abstract&oldid=14571 (accessed June 7, 2024).

CBE/CSE style

WikiPatents contributors. US Patent Application 18447211. SYSTEM AND METHOD FOR REMOVING DEBRIS DURING CHEMICAL MECHANICAL PLANARIZATION simplified abstract [Internet]. WikiPatents, ; 2023 Dec 6, 08:32 UTC [cited 2024 Jun 7]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18447211._SYSTEM_AND_METHOD_FOR_REMOVING_DEBRIS_DURING_CHEMICAL_MECHANICAL_PLANARIZATION_simplified_abstract&oldid=14571.

Bluebook style

US Patent Application 18447211. SYSTEM AND METHOD FOR REMOVING DEBRIS DURING CHEMICAL MECHANICAL PLANARIZATION simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18447211._SYSTEM_AND_METHOD_FOR_REMOVING_DEBRIS_DURING_CHEMICAL_MECHANICAL_PLANARIZATION_simplified_abstract&oldid=14571 (last visited June 7, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18447211. SYSTEM AND METHOD FOR REMOVING DEBRIS DURING CHEMICAL MECHANICAL PLANARIZATION simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=US_Patent_Application_18447211._SYSTEM_AND_METHOD_FOR_REMOVING_DEBRIS_DURING_CHEMICAL_MECHANICAL_PLANARIZATION_simplified_abstract&oldid=14571",
   note = "[Online; accessed 7-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18447211. SYSTEM AND METHOD FOR REMOVING DEBRIS DURING CHEMICAL MECHANICAL PLANARIZATION simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18447211._SYSTEM_AND_METHOD_FOR_REMOVING_DEBRIS_DURING_CHEMICAL_MECHANICAL_PLANARIZATION_simplified_abstract&oldid=14571}",
   note = "[Online; accessed 7-June-2024]"
 }


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