Cite This Page
Bibliographic details for US Patent Application 18360618. LITHOGRAPHY PROCESS MONITORING METHOD simplified abstract
- Page name: US Patent Application 18360618. LITHOGRAPHY PROCESS MONITORING METHOD simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 December 2023 04:02 UTC
- Date retrieved: 10 June 2024 16:05 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18360618._LITHOGRAPHY_PROCESS_MONITORING_METHOD_simplified_abstract&oldid=10588
- Page Version ID: 10588
Citation styles for US Patent Application 18360618. LITHOGRAPHY PROCESS MONITORING METHOD simplified abstract
APA style
US Patent Application 18360618. LITHOGRAPHY PROCESS MONITORING METHOD simplified abstract. (2023, December 4). WikiPatents, . Retrieved 16:05, June 10, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18360618._LITHOGRAPHY_PROCESS_MONITORING_METHOD_simplified_abstract&oldid=10588.
MLA style
"US Patent Application 18360618. LITHOGRAPHY PROCESS MONITORING METHOD simplified abstract." WikiPatents, . 4 Dec 2023, 04:02 UTC. 10 Jun 2024, 16:05 <http://wikipatents.org/index.php?title=US_Patent_Application_18360618._LITHOGRAPHY_PROCESS_MONITORING_METHOD_simplified_abstract&oldid=10588>.
MHRA style
WikiPatents contributors, 'US Patent Application 18360618. LITHOGRAPHY PROCESS MONITORING METHOD simplified abstract', WikiPatents, , 4 December 2023, 04:02 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18360618._LITHOGRAPHY_PROCESS_MONITORING_METHOD_simplified_abstract&oldid=10588> [accessed 10 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18360618. LITHOGRAPHY PROCESS MONITORING METHOD simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18360618._LITHOGRAPHY_PROCESS_MONITORING_METHOD_simplified_abstract&oldid=10588 (accessed June 10, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18360618. LITHOGRAPHY PROCESS MONITORING METHOD simplified abstract [Internet]. WikiPatents, ; 2023 Dec 4, 04:02 UTC [cited 2024 Jun 10]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18360618._LITHOGRAPHY_PROCESS_MONITORING_METHOD_simplified_abstract&oldid=10588.
Bluebook style
US Patent Application 18360618. LITHOGRAPHY PROCESS MONITORING METHOD simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18360618._LITHOGRAPHY_PROCESS_MONITORING_METHOD_simplified_abstract&oldid=10588 (last visited June 10, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18360618. LITHOGRAPHY PROCESS MONITORING METHOD simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_18360618._LITHOGRAPHY_PROCESS_MONITORING_METHOD_simplified_abstract&oldid=10588",
note = "[Online; accessed 10-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18360618. LITHOGRAPHY PROCESS MONITORING METHOD simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18360618._LITHOGRAPHY_PROCESS_MONITORING_METHOD_simplified_abstract&oldid=10588}",
note = "[Online; accessed 10-June-2024]"
}
