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Bibliographic details for US Patent Application 18359396. Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen simplified abstract

Citation styles for US Patent Application 18359396. Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen simplified abstract

APA style

US Patent Application 18359396. Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen simplified abstract. (2023, December 4). WikiPatents, . Retrieved 03:23, June 11, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18359396._Chemical_Mechanical_Polishing_Apparatus_Including_a_Multi-Zone_Platen_simplified_abstract&oldid=10579.

MLA style

"US Patent Application 18359396. Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen simplified abstract." WikiPatents, . 4 Dec 2023, 04:01 UTC. 11 Jun 2024, 03:23 <http://wikipatents.org/index.php?title=US_Patent_Application_18359396._Chemical_Mechanical_Polishing_Apparatus_Including_a_Multi-Zone_Platen_simplified_abstract&oldid=10579>.

MHRA style

WikiPatents contributors, 'US Patent Application 18359396. Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen simplified abstract', WikiPatents, , 4 December 2023, 04:01 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18359396._Chemical_Mechanical_Polishing_Apparatus_Including_a_Multi-Zone_Platen_simplified_abstract&oldid=10579> [accessed 11 June 2024]

Chicago style

WikiPatents contributors, "US Patent Application 18359396. Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18359396._Chemical_Mechanical_Polishing_Apparatus_Including_a_Multi-Zone_Platen_simplified_abstract&oldid=10579 (accessed June 11, 2024).

CBE/CSE style

WikiPatents contributors. US Patent Application 18359396. Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen simplified abstract [Internet]. WikiPatents, ; 2023 Dec 4, 04:01 UTC [cited 2024 Jun 11]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18359396._Chemical_Mechanical_Polishing_Apparatus_Including_a_Multi-Zone_Platen_simplified_abstract&oldid=10579.

Bluebook style

US Patent Application 18359396. Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18359396._Chemical_Mechanical_Polishing_Apparatus_Including_a_Multi-Zone_Platen_simplified_abstract&oldid=10579 (last visited June 11, 2024).

BibTeX entry

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18359396. Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "http://wikipatents.org/index.php?title=US_Patent_Application_18359396._Chemical_Mechanical_Polishing_Apparatus_Including_a_Multi-Zone_Platen_simplified_abstract&oldid=10579",
   note = "[Online; accessed 11-June-2024]"
 }

When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred: 

 @misc{ wiki:xxx,
   author = "WikiPatents",
   title = "US Patent Application 18359396. Chemical Mechanical Polishing Apparatus Including a Multi-Zone Platen simplified abstract --- WikiPatents{,} ",
   year = "2023",
   url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18359396._Chemical_Mechanical_Polishing_Apparatus_Including_a_Multi-Zone_Platen_simplified_abstract&oldid=10579}",
   note = "[Online; accessed 11-June-2024]"
 }


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