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Bibliographic details for US Patent Application 18230968. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract
- Page name: US Patent Application 18230968. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract
- Author: WikiPatents contributors
- Publisher: WikiPatents, .
- Date of last revision: 4 December 2023 03:57 UTC
- Date retrieved: 1 June 2024 01:06 UTC
- Permanent URL: http://wikipatents.org/index.php?title=US_Patent_Application_18230968._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract&oldid=10550
- Page Version ID: 10550
Citation styles for US Patent Application 18230968. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract
APA style
US Patent Application 18230968. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract. (2023, December 4). WikiPatents, . Retrieved 01:06, June 1, 2024 from http://wikipatents.org/index.php?title=US_Patent_Application_18230968._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract&oldid=10550.
MLA style
"US Patent Application 18230968. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract." WikiPatents, . 4 Dec 2023, 03:57 UTC. 1 Jun 2024, 01:06 <http://wikipatents.org/index.php?title=US_Patent_Application_18230968._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract&oldid=10550>.
MHRA style
WikiPatents contributors, 'US Patent Application 18230968. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract', WikiPatents, , 4 December 2023, 03:57 UTC, <http://wikipatents.org/index.php?title=US_Patent_Application_18230968._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract&oldid=10550> [accessed 1 June 2024]
Chicago style
WikiPatents contributors, "US Patent Application 18230968. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract," WikiPatents, , http://wikipatents.org/index.php?title=US_Patent_Application_18230968._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract&oldid=10550 (accessed June 1, 2024).
CBE/CSE style
WikiPatents contributors. US Patent Application 18230968. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract [Internet]. WikiPatents, ; 2023 Dec 4, 03:57 UTC [cited 2024 Jun 1]. Available from: http://wikipatents.org/index.php?title=US_Patent_Application_18230968._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract&oldid=10550.
Bluebook style
US Patent Application 18230968. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract, http://wikipatents.org/index.php?title=US_Patent_Application_18230968._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract&oldid=10550 (last visited June 1, 2024).
BibTeX entry
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18230968. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "http://wikipatents.org/index.php?title=US_Patent_Application_18230968._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract&oldid=10550",
note = "[Online; accessed 1-June-2024]"
}
When using the LaTeX package url (\usepackage{url} somewhere in the preamble) which tends to give much more nicely formatted web addresses, the following may be preferred:
@misc{ wiki:xxx,
author = "WikiPatents",
title = "US Patent Application 18230968. EUV PHOTO MASKS AND MANUFACTURING METHOD THEREOF simplified abstract --- WikiPatents{,} ",
year = "2023",
url = "\url{http://wikipatents.org/index.php?title=US_Patent_Application_18230968._EUV_PHOTO_MASKS_AND_MANUFACTURING_METHOD_THEREOF_simplified_abstract&oldid=10550}",
note = "[Online; accessed 1-June-2024]"
}
