View source for 18328818. METHODS FOR FORMING COATING FILMS AND SUBSTRATE PROCESSING APPARATUS INCLUDING PARTS MANUFACTURED BY SUCH METHODS simplified abstract (Samsung Electronics Co., Ltd.)

=METHODS FOR FORMING COATING FILMS AND SUBSTRATE PROCESSING APPARATUS INCLUDING PARTS MANUFACTURED BY SUCH METHODS=


==Organization Name==

[[:Category:Samsung Electronics Co., Ltd.|Samsung Electronics Co., Ltd.]]


[[Category:Samsung Electronics Co., Ltd.]]

==Inventor(s)==

[[:Category:Seungjun Lee of Seoul (KR)|Seungjun Lee of Seoul (KR)]][[Category:Seungjun Lee of Seoul (KR)]]

[[:Category:Nongmoon Hwang of Seoul (KR)|Nongmoon Hwang of Seoul (KR)]][[Category:Nongmoon Hwang of Seoul (KR)]]

==METHODS FOR FORMING COATING FILMS AND SUBSTRATE PROCESSING APPARATUS INCLUDING PARTS MANUFACTURED BY SUCH METHODS - A simplified explanation of the abstract==


This abstract first appeared for US patent application 18328818 titled 'METHODS FOR FORMING COATING FILMS AND SUBSTRATE PROCESSING APPARATUS INCLUDING PARTS MANUFACTURED BY SUCH METHODS

==Simplified Explanation==

The patent application describes methods and apparatus for forming a coating film using an orthorhombic vernier phase rare-earth element oxyfluoride. The process involves providing a coating source containing the rare-earth element oxyfluoride and a part in a vacuum chamber, and then using a physical vapor deposition process to form the coating film on the part. The resulting coating film includes the orthorhombic vernier phase rare-earth element oxyfluoride.

* The patent application describes a method of forming a coating film using an orthorhombic vernier phase rare-earth element oxyfluoride.
* The method involves providing a coating source and a part in a vacuum chamber.
* A physical vapor deposition process is then used to form the coating film on the part.
* The resulting coating film contains the orthorhombic vernier phase rare-earth element oxyfluoride.

Potential applications of this technology:

* This technology can be used in various industries that require high-performance coatings, such as aerospace, automotive, and electronics.
* The coating film can provide enhanced protection against wear, corrosion, and oxidation.
* It can also improve the surface properties of the part, such as hardness, smoothness, and adhesion.

Problems solved by this technology:

* The use of the orthorhombic vernier phase rare-earth element oxyfluoride in the coating film can address the limitations of conventional coating materials.
* It can provide improved performance and durability compared to traditional coatings.
* The technology can also offer better control over the coating thickness and composition.

Benefits of this technology:

* The coating film with the orthorhombic vernier phase rare-earth element oxyfluoride can enhance the lifespan and reliability of the coated parts.
* It can reduce maintenance and replacement costs by providing superior protection against wear and corrosion.
* The technology can enable the development of advanced coatings with tailored properties for specific applications.


==Original Abstract Submitted==

Provided herein are methods of forming a coating film that include providing a coating source including an orthorhombic vernier phase rare-earth element oxyfluoride and a part in a vacuum chamber, and performing a physical vapor deposition (PVD) process to form the coating film the part, wherein the coating film includes the orthorhombic vernier phase rare-earth element oxyfluoride. Apparatus including parts having coating films comprising an orthorhombic vernier phase rare-earth element oxyfluoride are also provided.



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