SEARCH RESULTS for assignor:"PAREEK, YOGITA"

Showing 1 to 3 of 3 results

Share this

Reel/Frame

Last Update:

Patent(s)

(X0) 15784058: CHEMICAL CONVERSION OF YTTRIA INTO YTTRIUM FLUORIDE AND YTTRIUM OXYFLUORIDE TO DEVELOP PRE-SEASONED COROSSION RESISTIVE COATING FOR PLASMA COMPONENTS

(A1) 20180105701: CHEMICAL CONVERSION OF YTTRIA INTO YTTRIUM FLUORIDE AND YTTRIUM OXYFLUORIDE TO DEVELOP PRE-SEASONED COROSSION RESISTIVE COATING FOR PLASMA COMPONENTS

Reel/Frame

Last Update:

Patent(s)

(X0) 15663124: METHOD TO DEPOSIT ALUMINUM OXY-FLUORIDE LAYER FOR FAST RECOVERY OF ETCH AMOUNT IN ETCH CHAMBER

(A1) 20180061617: METHOD TO DEPOSIT ALUMINUM OXY-FLUORIDE LAYER FOR FAST RECOVERY OF ETCH AMOUNT IN ETCH CHAMBER

Reel/Frame

Last Update:

Patent(s)

(X0) 14486105: GENERATION OF COMPACT ALUMINA PASSIVATION LAYERS ON ALUMINUM PLASMA EQUIPMENT COMPONENTS

(A1) 20150275375: GENERATION OF COMPACT ALUMINA PASSIVATION LAYERS ON ALUMINUM PLASMA EQUIPMENT COMPONENTS

(B2) 9: GENERATION OF COMPACT ALUMINA PASSIVATION LAYERS ON ALUMINUM PLASMA EQUIPMENT COMPONENTS