Reel/Frame

43437/184

Last Update:

19-Feb-2019

Patent(s)

(X0) 15547713: LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

(A1) 20180017879: LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

(B2) 1: LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Assignor(s)

BUTLER, HANS, WIJCKMANS, MAURICE WILLEM JOZEF ETIËNNE, VAN DER PASCH, ENGELBERTUS ANTONIUS FRANSISCUS, HOOGENDAM, CHRISTIAAN ALEXANDER, LUTTIKHUIS, BERNARDUS ANTONIUS JOHANNES

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

43437/217

Last Update:

19-Feb-2019

Patent(s)

(X0) 15547713: LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

(A1) 20180017879: LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

(B2) 1: LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Assignor(s)

BUTLER, HANS, WIJCKMANS, MAURICE WILLEM JOZEF ETIËNNE, VAN DER PASCH, ENGELBERTUS ANTONIUS FRANSISCUS, HOOGENDAM, CHRISTIAAN ALEXANDER, LUTTIKHUIS, BERNARDUS ANTONIUS JOHANNES

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

44371/956

Last Update:

19-Feb-2019

Patent(s)

(X0) 15838634: FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

(A1) 20180101102: FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

(B2) 1: FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Assignor(s)

CORTIE, ROGIER HENDRIKUS MAGDALENA, LIEBREGTS, PAULUS MARTINUS MARIA, RIEPEN, MICHEL, EVANGELISTA, FABRIZIO

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

44388/454

Last Update:

19-Feb-2019

Patent(s)

(X0) 15824686: LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

(A1) 20180081285: LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

(B2) 1: LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Assignor(s)

BECKERS, MARCEL, DONDERS, SJOERD NICOLAAS LAMBERTUS, HOOGENDAM, CHRISTIAAN ALEXANDER, JACOBS, JOHANNES HENRICUS WILHELMUS, TEN KATE, NICOLAAS, KEMPER, NICOLAAS RUDOLF, MIGCHELBRINK, FERDY, EVERS, ELMAR

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

45840/189

Last Update:

19-Feb-2019

Patent(s)

(X0) 15913253: Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method

(A1) 20180195857: Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method

(B2) 1: Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method

Assignor(s)

PELLEMANS, HENRICUS PETRUS MARIA, DEN BOEF, ARIE JEFFREY

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

46526/411

Last Update:

14-Feb-2019

Patent(s)

(X0) 16051697: METHOD AND APPARATUS TO DETERMINE A PATTERNING PROCESS PARAMETER

(A1) 20190049859: METHOD AND APPARATUS TO DETERMINE A PATTERNING PROCESS PARAMETER

Assignor(s)

TSIATMAS, ANAGNOSTIS, MC NAMARA, ELLIOTT GERARD

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

46697/36

Last Update:

14-Feb-2019

Patent(s)

(X0) 16078699: WAVELENGTH COMBINING OF MULTIPLE SOURCE

(A1) 20190049864: WAVELENGTH COMBINING OF MULTIPLE SOURCE

Assignor(s)

HUGERS, RONALD FRANCISCUS HERMAN, TEUNISSEN, PAULUS ANTONIUS ANDREAS

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

46895/302

Last Update:

14-Feb-2019

Patent(s)

(X0) 16079169: VIBRATION ISOLATOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

(A1) 20190049852: VIBRATION ISOLATOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Assignor(s)

BUTLER, HANS, DE HOON, CORNELIUS ADRIANUS LAMBERTUS, JACOBS, FRANSISCUS MATHIJS, KAGAN, PAVEL, STARREVELD, JEROEN PIETER, WIJCKMANS, MAURICE WILLEM JOZEF ETIENNE

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

47454/823

Last Update:

14-Feb-2019

Patent(s)

(X0) 16069678: POSITION SENSING ARRANGEMENT AND LITHOGRAPHIC APPARATUS INCLUDING SUCH AN ARRANGEMENT, POSITION SENSING METHOD AND DEVICE MANUFACTURING METHOD

(A1) 20190049866: POSITION SENSING ARRANGEMENT AND LITHOGRAPHIC APPARATUS INCLUDING SUCH AN ARRANGEMENT, POSITION SENSING METHOD AND DEVICE MANUFACTURING METHOD

Assignor(s)

HUISMAN, SIMON REINALD, POLO, ALESSANDRO, AKBULUT, DUYGU, GOORDEN, SEBASTIANUS ADRIANUS, DEN BOEF, ARIE JEFFREY

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

42245/269

Last Update:

01-Jan-2019

Patent(s)

(X0) 15523938: RADIATION BEAM APPARATUS

(A1) 20180314164: RADIATION BEAM APPARATUS

(B2) 1: RADIATION BEAM APPARATUS

Assignor(s)

DEKKERS, JEROEN, NIENHUYS, HAN-KWANG, RENKENS, MICHAEL JOZEF MATHIJS, AKKERMANS, JOHANNES ANTONIUS GERARDUS, DE VRIES, GOSSE CHARLES, LOOPSTRA, ERIK ROELOF

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

43757/569

Last Update:

01-Jan-2019

Patent(s)

(X0) 14543326: METHODS AND SYSTEM FOR MODEL-BASED GENERIC MATCHING AND TUNING

(A1) 20150074619: METHODS AND SYSTEM FOR MODEL-BASED GENERIC MATCHING AND TUNING

(B2) 1: METHODS AND SYSTEM FOR MODEL-BASED GENERIC MATCHING AND TUNING

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

44734/148

Last Update:

01-Jan-2019

Patent(s)

(X0) 15857368: VACUUM SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY

(A1) 20180120715: VACUUM SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY

(B2) 1: VACUUM SYSTEM FOR IMMERSION PHOTOLITHOGRAPHY

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

46032/151

Last Update:

27-Dec-2018

Patent(s)

(X0) 16060837: A MEMBRANE ASSEMBLY

(A1) 20180373141: A MEMBRANE ASSEMBLY

Assignor(s)

BROUNS, DERK SERVATIUS GERTRUDA, JANSSEN, PAUL, KAMALI, MOHAMMAD REZA, PETER, MARIA, VAN DER ZANDE, WILLEM JOAN, VAN ZWOL, PIETER-JAN, VLES, DAVID FERDINAND, VOORTHUIJZEN, WILLEM-PIETER

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

46032/284

Last Update:

27-Dec-2018

Patent(s)

(X0) 16060837: A MEMBRANE ASSEMBLY

(A1) 20180373141: A MEMBRANE ASSEMBLY

Assignor(s)

BROUNS, DERK SERVATIUS GERTRUDA, JANSSEN, PAUL, KAMALI, MOHAMMAD REZA, PETER, MARIA, VAN DER ZANDE, WILLEM JOAN, VAN ZWOL, PIETER-JAN, VLES, DAVID FERDINAND, VOORTHUIJZEN, WILLEM-PIETER

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

46032/222

Last Update:

27-Dec-2018

Patent(s)

(X0) 16060837: A MEMBRANE ASSEMBLY

(A1) 20180373141: A MEMBRANE ASSEMBLY

Assignor(s)

VAN ZWOL, PIETER-JAN, DE GRAAF, DENNIS, JANSSEN, PAUL, PETER, MARIA, VAN DE KERKHOF, MARCUS ADRIANUS, VAN DER ZANDE, WILLEM JOAN, VLES, DAVID FERDINAND, VOORTHUIJZEN, WILLEM-PIETER

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

46032/75

Last Update:

27-Dec-2018

Patent(s)

(X0) 16060837: A MEMBRANE ASSEMBLY

(A1) 20180373141: A MEMBRANE ASSEMBLY

Assignor(s)

BROUNS, DERK SERVATIUS GERTRUDA, JANSSEN, PAUL, PETER, MARIA, VAN DER ZANDE, WILLEM JOAN, VAN ZWOL, PIETER-JAN, VLES, DAVID FERDINAND, VOORTHUIJZEN, WILLEM-PIETER

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

46077/830

Last Update:

27-Dec-2018

Patent(s)

(X0) 16061947: TOPOGRAPHY MEASUREMENT SYSTEM

(A1) 20180373171: TOPOGRAPHY MEASUREMENT SYSTEM

Assignor(s)

REIJNEN, MARTINUS CORNELIS, HUGERS, RONALD FRANCISCUS HERMAN, TEUNISSEN, PAULUS ANTONIUS ANDREAS

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

46077/815

Last Update:

27-Dec-2018

Patent(s)

(X0) 16061947: TOPOGRAPHY MEASUREMENT SYSTEM

(A1) 20180373171: TOPOGRAPHY MEASUREMENT SYSTEM

Assignor(s)

HUGERS, RONALD FRANCISCUS HERMAN, REIJNEN, MARTINUS CORNELIS

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

46097/541

Last Update:

27-Dec-2018

Patent(s)

(X0) 16062735: LITHOGRAPHIC APPARATUS HAVING AN ACTIVE BASE FRAME SUPPORT

(A1) 20180373156: LITHOGRAPHIC APPARATUS HAVING AN ACTIVE BASE FRAME SUPPORT

Assignor(s)

BUTLER, HANS, BUKKEMS, BJÖRN HUBERTUS MARIA, DE HOON, CORNELIUS ADRIANUS LAMBERTUS, WIJCKMANS, MAURICE WILLEM JOZEF ETIËNNE

Assignee(s)

ASML NETHERLANDS B.V.

Reel/Frame

46100/935

Last Update:

27-Dec-2018

Patent(s)

(X0) 16062919: METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY FOR EUV LITHOGRAPHY, A MEMBRANE ASSEMBLY, A LITHOGRAPHIC APPARATUS, AND A DEVICE MANUFACTURING METHOD

(A1) 20180373170: METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY FOR EUV LITHOGRAPHY, A MEMBRANE ASSEMBLY, A LITHOGRAPHIC APPARATUS, AND A DEVICE MANUFACTURING METHOD

Assignor(s)

JANSSEN, PAUL, ZDRAVKOV, ALEKSANDAR NIKOLOV, KLOOTWIJK, JOHAN HENDRIK, VAN DEN EINDEN, WILHELMUS THEODORUS ANTHONIUS JOHANNES

Assignee(s)

ASML NETHERLANDS B.V.