SEARCH RESULTS for assignor:POVOLNY, HENRY STEPHEN

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(X0) 15902861: Feedback Control System for Iterative Etch Process

(A1) 20190259674: Feedback Control System for Iterative Etch Process

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(X0) 14141079: EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

(A1) 20150187614: EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

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(B2) 10090211: EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY

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(X0) 15690184: Electrostatic Chuck Including Clamp Electrode Assembly Forming Portion of Faraday Cage for RF Delivery and Associated Methods

(A1) 20180130689: Electrostatic Chuck Including Clamp Electrode Assembly Forming Portion of Faraday Cage for RF Delivery and Associated Methods

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(X0) 15690203: Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods for Operation, Monitoring, and Control

(A1) 20180130690: Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods for Operation, Monitoring, and Control