SEARCH RESULTS for assignor:HAGELIN, PAUL M

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(X0) 15497146: MICROELECTROMECHANICAL RESONATOR

(A1) 20170230030: MICROELECTROMECHANICAL RESONATOR

(B2) 1: MICROELECTROMECHANICAL RESONATOR

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(X0) 15702717: FREQUENCY-MODULATING SENSOR ARRAY

(A1) 20180087984: FREQUENCY-MODULATING SENSOR ARRAY

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(X0) 15897135: MEMS CAVITY WITH NON-CONTAMINATING SEAL

(A1) 20180257929: MEMS CAVITY WITH NON-CONTAMINATING SEAL

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