SEARCH RESULTS for assignee:"LAM RESEARCH CORPORATION"

Showing 1 to 20 of 72 results

Share this

Reel/Frame

Last Update:

Patent(s)

(X0) 15842763: Corrosion-Resistant Temperature Sensor Probe

(A1) 20190187003: Corrosion-Resistant Temperature Sensor Probe

Reel/Frame

Last Update:

Patent(s)

(X0) 15845910: SELF-ASSEMBLED MONOLAYERS AS AN ETCHANT IN ATOMIC LAYER ETCHING

(A1) 20190189462: SELF-ASSEMBLED MONOLAYERS AS AN ETCHANT IN ATOMIC LAYER ETCHING

Reel/Frame

Last Update:

Patent(s)

(X0) 15847234: METHOD FOR FORMING SQUARE SPACERS

(A1) 20190189447: METHOD FOR FORMING SQUARE SPACERS

Reel/Frame

Last Update:

Patent(s)

(X0) 15954454: EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

(A1) 20190185999: EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING

Reel/Frame

Last Update:

Patent(s)

(X0) 15369110: MULTIPLE CONTROL MODES

(A1) 20170084432: MULTIPLE CONTROL MODES

(B2) 1: MULTIPLE CONTROL MODES

Reel/Frame

Last Update:

Patent(s)

(X0) 15005877: Gas Distribution System For Ceramic Showerhead of Plasma Etch Reactor

(A1) 20160217977: Gas Distribution System For Ceramic Showerhead of Plasma Etch Reactor

Reel/Frame

Last Update:

Patent(s)

(X0) 15837707: KNURLING EDGE DRIVING TOOL

(A1) 20190176280: KNURLING EDGE DRIVING TOOL

Reel/Frame

Last Update:

Patent(s)

(X0) 16213386: INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RADICAL AND PRECURSOR GAS TO A DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION

(A1) 20190177846: INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RADICAL AND PRECURSOR GAS TO A DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION

Reel/Frame

Last Update:

Patent(s)

(X0) 15499318: METHODS AND APPARATUS FOR DEPOSITING SILICON OXIDE ON METAL LAYERS

(A1) 20180315597: METHODS AND APPARATUS FOR DEPOSITING SILICON OXIDE ON METAL LAYERS

(B2) 1: METHODS AND APPARATUS FOR DEPOSITING SILICON OXIDE ON METAL LAYERS

Reel/Frame

Last Update:

Patent(s)

(X0) 16000734: AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

(A1) 20190172738: AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

Reel/Frame

Last Update:

Patent(s)

(X0) 16267932: MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING CHAMBER

(A1) 20190172684: MECHANICAL SUPPRESSION OF PARASITIC PLASMA IN SUBSTRATE PROCESSING CHAMBER

Reel/Frame

Last Update:

Patent(s)

(X0) 15046214: Line Charge Volume With Integrated Pressure Measurement

(A1) 20170236735: Line Charge Volume With Integrated Pressure Measurement

(B2) 1: Line Charge Volume With Integrated Pressure Measurement

Reel/Frame

Last Update:

Patent(s)

(X0) 15446543: SYSTEMS AND METHODS FOR ALIGNING MEASUREMENT DEVICE IN SUBSTRATE PROCESSING SYSTEMS

(A1) 20170287753: SYSTEMS AND METHODS FOR ALIGNING MEASUREMENT DEVICE IN SUBSTRATE PROCESSING SYSTEMS

(B2) 1: SYSTEMS AND METHODS FOR ALIGNING MEASUREMENT DEVICE IN SUBSTRATE PROCESSING SYSTEMS

Reel/Frame

Last Update:

Patent(s)

(B1) 1: SUBSTRATE PROCESSING SYSTEM PRINTED-CIRCUIT CONTROL BOARD ASSEMBLY WITH ONE OR MORE HEATER LAYERS

(X0) 15825682: SUBSTRATE PROCESSING SYSTEM PRINTED-CIRCUIT CONTROL BOARD ASSEMBLY WITH ONE OR MORE HEATER LAYERS

(A1) 20190166700: SUBSTRATE PROCESSING SYSTEM PRINTED-CIRCUIT CONTROL BOARD ASSEMBLY WITH ONE OR MORE HEATER LAYERS

(B2) 1: SUBSTRATE PROCESSING SYSTEM PRINTED-CIRCUIT CONTROL BOARD ASSEMBLY WITH ONE OR MORE HEATER LAYERS

Reel/Frame

Last Update:

Patent(s)

(X0) 15828258: Ferrite Cage RF Isolator For Power Circuitry

(A1) 20190164729: Ferrite Cage RF Isolator For Power Circuitry

Reel/Frame

Last Update:

Patent(s)

(X0) 15974172: METHOD OF IMPROVING DEPOSITION INDUCED CD IMBALANCE USING SPATIALLY SELECTIVE ASHING OF CARBON BASED FILM

(A1) 20190164757: METHOD OF IMPROVING DEPOSITION INDUCED CD IMBALANCE USING SPATIALLY SELECTIVE ASHING OF CARBON BASED FILM

Reel/Frame

Last Update:

Patent(s)

(X0) 14887959: LOAD LOCK INTERFACE AND INTEGRATED POST-PROCESSING MODULE

(A1) 20170110351: LOAD LOCK INTERFACE AND INTEGRATED POST-PROCESSING MODULE

(B2) 1: LOAD LOCK INTERFACE AND INTEGRATED POST-PROCESSING MODULE

Reel/Frame

Last Update:

Patent(s)

(X0) 15077844: ASYMMETRIC PEDESTAL/CARRIER RING ARRANGEMENT FOR EDGE IMPEDANCE MODULATION

(A1) 20170275756: ASYMMETRIC PEDESTAL/CARRIER RING ARRANGEMENT FOR EDGE IMPEDANCE MODULATION

(B2) 1: ASYMMETRIC PEDESTAL/CARRIER RING ARRANGEMENT FOR EDGE IMPEDANCE MODULATION

Reel/Frame

Last Update:

Patent(s)

(X0) 15691405: GAS EXHAUST BY-PRODUCT MEASUREMENT SYSTEM

(A1) 20190064057: GAS EXHAUST BY-PRODUCT MEASUREMENT SYSTEM

(B2) 1: GAS EXHAUST BY-PRODUCT MEASUREMENT SYSTEM

Reel/Frame

Last Update:

Patent(s)

(X0) 15928029: MULTI-LEVEL PULSING OF DC AND RF SIGNALS

(B1) 1: MULTI-LEVEL PULSING OF DC AND RF SIGNALS