Patent Assignment 32487/692

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

  • Reel/Frame: 32487/692
  • Execution Date: Mar 28, 2012
  • Correspondent

    LOWE HAUPTMAN & HAM, LLP (TSMC)

    2318 MILL ROAD
    SUITE 1400
    ALEXANDRIA, VA 22314

Properties

Patent Publication Application
WAFER PROCESSING SYSTEM USING MULTI-ZONE CHUCK (A1) 20140202383
Jul 24, 2014
(B2) 9892954
Feb 13, 2018
(X0) 14220708
Mar 20, 2014