SEARCH RESULTS for assignee:"versum materials us"

Showing 1 to 20 of 27 results

Reel/Frame

Last Update:

Patent(s)

(X0) 15954906: Method and Composition for Providing Pore Sealing Layer on Porous Low Dielectric Constant Films

(A1) 20180277360: Method and Composition for Providing Pore Sealing Layer on Porous Low Dielectric Constant Films

Reel/Frame

Last Update:

Patent(s)

(X0) 15764751: METHODS FOR DEPOSITING A CONFORMAL METAL OR METALLOID SILICON NITRIDE FILM

(A1) 20180274097: METHODS FOR DEPOSITING A CONFORMAL METAL OR METALLOID SILICON NITRIDE FILM

Reel/Frame

Last Update:

Patent(s)

(X0) 15914968: Formulation for Deposition of Silicon Doped Hafnium Oxide as Ferroelectric Materials

(A1) 20180269057: Formulation for Deposition of Silicon Doped Hafnium Oxide as Ferroelectric Materials

Reel/Frame

Last Update:

Patent(s)

(X0) 15914962: Formulation for Deposition of Silicon Doped Hafnium Oxide as Ferroelectric Materials

(A1) 20180265967: Formulation for Deposition of Silicon Doped Hafnium Oxide as Ferroelectric Materials

Reel/Frame

Last Update:

Patent(s)

(X0) 15461999: Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same

(A1) 20170183502: Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same

(B2) 1: Organoaminodisilane Precursors and Methods for Depositing Films Comprising Same

Reel/Frame

Last Update:

Patent(s)

Reel/Frame

Last Update:

Patent(s)

Reel/Frame

Last Update:

Patent(s)

(X0) 15865585: TiN Hard Mask and Etch Residue Removal

(A1) 20180251711: TiN Hard Mask and Etch Residue Removal

Reel/Frame

Last Update:

Patent(s)

(X0) 15757805: METHODS FOR DEPOSITING A CONFORMAL METAL OR METALLOID SILICON NITRIDE FILM AND RESULTANT FILMS

(A1) 20180245215: METHODS FOR DEPOSITING A CONFORMAL METAL OR METALLOID SILICON NITRIDE FILM AND RESULTANT FILMS

Reel/Frame

Last Update:

Patent(s)

(X0) 15901317: Chemical Mechanical Planarization of Films Comprising Elemental Silicon

(A1) 20180244955: Chemical Mechanical Planarization of Films Comprising Elemental Silicon

Reel/Frame

Last Update:

Patent(s)

(X0) 15459389: Methods for Depositing Films with Organoaminodisilane Precursors

(A1) 20170186605: Methods for Depositing Films with Organoaminodisilane Precursors

(B2) 9: Methods for Depositing Films with Organoaminodisilane Precursors

Reel/Frame

Last Update:

Patent(s)

(X0) 15790931: DISUBSTITUTED ALKYNE DICOBALT HEXACARBONYL COMPOUNDS, METHOD OF MAKING AND METHOD OF USE THEREOF

(A1) 20180134738: DISUBSTITUTED ALKYNE DICOBALT HEXACARBONYL COMPOUNDS, METHOD OF MAKING AND METHOD OF USE THEREOF

Reel/Frame

Last Update:

Patent(s)

(X0) 15792092: COBALT COMPOUNDS, METHOD OF MAKING AND METHOD OF USE THEREOF

(A1) 20180135174: COBALT COMPOUNDS, METHOD OF MAKING AND METHOD OF USE THEREOF

Reel/Frame

Last Update:

Patent(s)

(X0) 15698794: Compositions and Methods for the Deposition of Silicon Oxide Films

(A1) 20180127592: Compositions and Methods for the Deposition of Silicon Oxide Films

Reel/Frame

Last Update:

Patent(s)

(X0) 15789732: Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features Features

(A1) 20180122631: Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features Features

Reel/Frame

Last Update:

Patent(s)

(X0) 15848270: Silicon-Based Films and Methods of Forming the Same

(A1) 20180119276: Silicon-Based Films and Methods of Forming the Same

Reel/Frame

Last Update:

Patent(s)

(X0) 15789790: USE OF SILYL BRIDGED ALKYL COMPOUNDS FOR DENSE OSG FILMS

(A1) 20180122632: USE OF SILYL BRIDGED ALKYL COMPOUNDS FOR DENSE OSG FILMS

Reel/Frame

Last Update:

Patent(s)

(X0) 15843080: Disubstituted Alkyne Dicobalt Hexacarbonyl Compounds, Method of Making and Method of Use Thereof

(A1) 20180122687: Disubstituted Alkyne Dicobalt Hexacarbonyl Compounds, Method of Making and Method of Use Thereof

Reel/Frame

Last Update:

Patent(s)

(X0) 15725122: Carbon Bridged Aminosilane Compounds for High Growth Rate Silicon-Containing Films

(A1) 20180105541: Carbon Bridged Aminosilane Compounds for High Growth Rate Silicon-Containing Films

Reel/Frame

Last Update:

Patent(s)

(X0) 15681102: Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features

(A1) 20180061636: Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features