SEARCH RESULTS for assignee:"lam research"

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(X0) 14615099: SPIN CHUCK WITH ROTATING GAS SHOWERHEAD

(A1) 20160230278: SPIN CHUCK WITH ROTATING GAS SHOWERHEAD

(B2) 1: SPIN CHUCK WITH ROTATING GAS SHOWERHEAD

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(X0) 15156129: FEATURE FILL WITH MULTI-STAGE NUCLEATION INHIBITION

(A1) 20160343612: FEATURE FILL WITH MULTI-STAGE NUCLEATION INHIBITION

(B2) 1: FEATURE FILL WITH MULTI-STAGE NUCLEATION INHIBITION

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(X0) 15449799: TECHNIQUE TO TUNE SIDEWALL PASSIVATION DEPOSITION CONFORMALITY FOR HIGH ASPECT RATIO CYLINDER ETCH

(A1) 20170178920: TECHNIQUE TO TUNE SIDEWALL PASSIVATION DEPOSITION CONFORMALITY FOR HIGH ASPECT RATIO CYLINDER ETCH

(B2) 1: TECHNIQUE TO TUNE SIDEWALL PASSIVATION DEPOSITION CONFORMALITY FOR HIGH ASPECT RATIO CYLINDER ETCH

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(B1) 1: SELF-FORMING BARRIER PROCESS

(X0) 15635117: SELF-FORMING BARRIER PROCESS

(A1) 20180374747: SELF-FORMING BARRIER PROCESS

(B2) 1: SELF-FORMING BARRIER PROCESS

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(X0) 15632163: HIGH ASPECT RATIO ETCH OF OXIDE METAL OXIDE METAL STACK

(A1) 20180374712: HIGH ASPECT RATIO ETCH OF OXIDE METAL OXIDE METAL STACK

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(X0) 15799679: METHODS AND APPARATUSES FOR INCREASING REACTOR PROCESSING BATCH SIZE

(A1) 20180374697: METHODS AND APPARATUSES FOR INCREASING REACTOR PROCESSING BATCH SIZE